European Mask and Lithography Conference (EMLC) 2024

Session 10: Optical and E-Beam Direct Write, with Applications for Photonics, AR/VR and Quantum Computing
Mittwoch 19. Juni 2024, 13:50 – 14:10Uhr

Kevin Edelmann
„Optimal shape approximation and writing strategy for integrated photonic waveguides using variable-shaped e-beam direct lithography“
S. Fasold, M. Greul, J. Hartbaum, E. Linn, I. Stolberg, U. Weidenmueller,
Institut für Mikroelektronik Stuttgart, Stuttgart und Vistec Electron Beam GmbH, Jena