{"id":9942,"date":"2023-01-19T08:33:02","date_gmt":"2023-01-19T07:33:02","guid":{"rendered":"https:\/\/www.ims-chips.de\/?p=9942"},"modified":"2023-06-13T09:12:18","modified_gmt":"2023-06-13T07:12:18","slug":"tapes3-erhielt-den-kdt-technology-pioneer-award-2022","status":"publish","type":"post","link":"https:\/\/www.ims-chips.de\/?p=9942","title":{"rendered":"TAPES3 erhielt den KDT Technology Pioneer Award 2022"},"content":{"rendered":"\t\t<div data-elementor-type=\"wp-post\" data-elementor-id=\"9942\" class=\"elementor elementor-9942\">\n\t\t\t\t\t\t<section class=\"elementor-section elementor-top-section elementor-element elementor-element-8e921d8 elementor-section-boxed elementor-section-height-default elementor-section-height-default exad-glass-effect-no exad-sticky-section-no\" data-id=\"8e921d8\" data-element_type=\"section\" data-e-type=\"section\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-100 elementor-top-column elementor-element elementor-element-8898761 exad-glass-effect-no exad-sticky-section-no\" data-id=\"8898761\" data-element_type=\"column\" data-e-type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-13410c2 exad-sticky-section-no exad-glass-effect-no elementor-widget elementor-widget-heading\" data-id=\"13410c2\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t<h3 class=\"elementor-heading-title elementor-size-default\">TAPES3 erhielt den KDT Technology Pioneer Award 2022<\/h3>\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<section class=\"elementor-section elementor-top-section elementor-element elementor-element-f0a2152 elementor-section-boxed elementor-section-height-default elementor-section-height-default exad-glass-effect-no exad-sticky-section-no\" data-id=\"f0a2152\" data-element_type=\"section\" data-e-type=\"section\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-50 elementor-top-column elementor-element elementor-element-47cb302 exad-glass-effect-no exad-sticky-section-no\" data-id=\"47cb302\" data-element_type=\"column\" data-e-type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-c678bc4 exad-sticky-section-no exad-glass-effect-no elementor-widget elementor-widget-image\" data-id=\"c678bc4\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"image.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<img fetchpriority=\"high\" decoding=\"async\" width=\"344\" height=\"211\" src=\"https:\/\/www.ims-chips.de\/wp-content\/uploads\/2023\/01\/News_Bild_KDT_Award_22.jpg\" class=\"attachment-full size-full wp-image-9944\" alt=\"TAPES3 erhielt den KDT Technology Pioneer Award 2022\" srcset=\"https:\/\/www.ims-chips.de\/wp-content\/uploads\/2023\/01\/News_Bild_KDT_Award_22.jpg 344w, https:\/\/www.ims-chips.de\/wp-content\/uploads\/2023\/01\/News_Bild_KDT_Award_22-300x184.jpg 300w\" sizes=\"(max-width: 344px) 100vw, 344px\" \/>\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-2ab08c9 exad-sticky-section-no exad-glass-effect-no elementor-widget elementor-widget-text-editor\" data-id=\"2ab08c9\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<p>Frans List von ASML, hat auf dieser Konferenz den Preis im Namen des TAPES3-Konsortiums entgegengenommen.<\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t<div class=\"elementor-column elementor-col-50 elementor-top-column elementor-element elementor-element-a38a922 exad-glass-effect-no exad-sticky-section-no\" data-id=\"a38a922\" data-element_type=\"column\" data-e-type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-e12bca9 exad-sticky-section-no exad-glass-effect-no elementor-widget elementor-widget-text-editor\" data-id=\"e12bca9\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<p>TAPES3 wurde auf der EFECS 2022-Konferenz in Amsterdam mit dem &#8222;KDT Technology Pioneer Award&#8220; ausgezeichnet.<\/p><p>Der KDT JU Technology Pioneer Award 2022 ging an TAPES3 &#8211; das KDTJU-Projekt, welches die Fortsetzung des Moore&#8217;schen Gesetzes erm\u00f6glicht, indem es sich auf Lithographie, Metrologie und Maskeninfrastruktur konzentriert, um die n\u00e4chste Technologiegeneration zu entwickeln &#8211; den 3 nm-Knoten.<br \/>Das Institut f\u00fcr Mikroelektronik Stuttgart (IMS CHIPS) hat in den Arbeitspaketen Lithografie und EUV Maskeninfrastruktur mitgewirkt. Im Arbeitspaket Lithographie wurden ultragenaue Diffraktive Optische Elemente (DOE) f\u00fcr die Oberfl\u00e4chenpr\u00fcfung von EUV-Spiegeln entwickelt. Im Paket EUV Maskeninfrastruktur erforschte IMS CHIPS neue Konzepte zu Masken mit alternativen Absorbern.<\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<section class=\"elementor-section elementor-top-section elementor-element elementor-element-49b274a elementor-section-boxed elementor-section-height-default elementor-section-height-default exad-glass-effect-no exad-sticky-section-no\" data-id=\"49b274a\" data-element_type=\"section\" data-e-type=\"section\" data-settings=\"{&quot;background_background&quot;:&quot;classic&quot;}\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-100 elementor-top-column elementor-element elementor-element-4fcfc74 exad-glass-effect-no exad-sticky-section-no\" data-id=\"4fcfc74\" data-element_type=\"column\" data-e-type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-70de8ce exad-sticky-section-no exad-glass-effect-no elementor-widget elementor-widget-text-editor\" data-id=\"70de8ce\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<p>H\u00f6hepunkte der EFECS 2022 in Amsterdam:<a href=\"https:\/\/www.kdt-ju.europa.eu\/news\/highlights-efecs-2022-amsterdam\" target=\"_blank\" rel=\"noopener\"> www.kdt-ju.europa.eu\/news\/highlights-efecs-2022-amsterdam<\/a><\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<section class=\"elementor-section elementor-top-section elementor-element elementor-element-213b5b2 elementor-section-boxed elementor-section-height-default elementor-section-height-default exad-glass-effect-no exad-sticky-section-no\" data-id=\"213b5b2\" data-element_type=\"section\" data-e-type=\"section\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-100 elementor-top-column elementor-element elementor-element-702fafb exad-glass-effect-no exad-sticky-section-no\" data-id=\"702fafb\" data-element_type=\"column\" data-e-type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-eaed0d7 exad-sticky-section-no exad-glass-effect-no elementor-widget elementor-widget-spacer\" data-id=\"eaed0d7\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"spacer.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<div class=\"elementor-spacer\">\n\t\t\t<div class=\"elementor-spacer-inner\"><\/div>\n\t\t<\/div>\n\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<\/div>\n\t\t","protected":false},"excerpt":{"rendered":"<p>TAPES3 wurde auf der EFECS 2022-Konferenz in Amsterdam mit dem &#8222;KDT Technology Pioneer Award&#8220; ausgezeichnet.<\/p>\n","protected":false},"author":4,"featured_media":9944,"comment_status":"closed","ping_status":"closed","sticky":false,"template":"","format":"standard","meta":{"footnotes":""},"categories":[7],"tags":[],"class_list":["post-9942","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-archiv"],"yoast_head":"<!-- This site is optimized with the Yoast SEO plugin v28.7 - 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