{"id":9777,"date":"2022-10-18T13:27:53","date_gmt":"2022-10-18T11:27:53","guid":{"rendered":"https:\/\/www.ims-chips.de\/?p=9777"},"modified":"2022-10-19T10:36:37","modified_gmt":"2022-10-19T08:36:37","slug":"canon-fpa3030i5a","status":"publish","type":"post","link":"https:\/\/www.ims-chips.de\/?p=9777","title":{"rendered":"Neuer i-Line Stepper Canon FPA3030i5a in Betrieb"},"content":{"rendered":"\t\t<div data-elementor-type=\"wp-post\" data-elementor-id=\"9777\" class=\"elementor elementor-9777\">\n\t\t\t\t\t\t<section class=\"elementor-section elementor-top-section elementor-element elementor-element-f8be919 elementor-section-boxed elementor-section-height-default elementor-section-height-default exad-glass-effect-no exad-sticky-section-no\" data-id=\"f8be919\" data-element_type=\"section\" data-e-type=\"section\" data-settings=\"{&quot;background_background&quot;:&quot;classic&quot;}\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-100 elementor-top-column elementor-element elementor-element-c0ea536 exad-glass-effect-no exad-sticky-section-no\" data-id=\"c0ea536\" data-element_type=\"column\" data-e-type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-672976b exad-sticky-section-no exad-glass-effect-no elementor-widget elementor-widget-heading\" data-id=\"672976b\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t<h5 class=\"elementor-heading-title elementor-size-default\">IMS CHIPS Newsletter 2\/2022<\/h5>\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<section class=\"elementor-section elementor-top-section elementor-element elementor-element-49971e9 elementor-section-boxed elementor-section-height-default elementor-section-height-default exad-glass-effect-no exad-sticky-section-no\" data-id=\"49971e9\" data-element_type=\"section\" data-e-type=\"section\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-100 elementor-top-column elementor-element elementor-element-066e9d7 exad-glass-effect-no exad-sticky-section-no\" data-id=\"066e9d7\" data-element_type=\"column\" data-e-type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-31d8acf exad-sticky-section-no exad-glass-effect-no elementor-widget elementor-widget-heading\" data-id=\"31d8acf\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t<h2 class=\"elementor-heading-title elementor-size-default\">Neuer i-Line Stepper Canon FPA3030i5a in Betrieb<\/h2>\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<section class=\"elementor-section elementor-top-section elementor-element elementor-element-4bb3d89 elementor-section-boxed elementor-section-height-default elementor-section-height-default exad-glass-effect-no exad-sticky-section-no\" data-id=\"4bb3d89\" data-element_type=\"section\" data-e-type=\"section\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-100 elementor-top-column elementor-element elementor-element-c2f6cb0 exad-glass-effect-no exad-sticky-section-no\" data-id=\"c2f6cb0\" data-element_type=\"column\" data-e-type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-7a38e2f exad-sticky-section-no exad-glass-effect-no elementor-widget elementor-widget-text-editor\" data-id=\"7a38e2f\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<p><strong>Weiterer Meilenstein bei der Erweiterung der Linie auf 200 mm Wafer erreicht<\/strong><\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<section class=\"elementor-section elementor-top-section elementor-element elementor-element-21c0eb6 elementor-section-boxed elementor-section-height-default elementor-section-height-default exad-glass-effect-no exad-sticky-section-no\" data-id=\"21c0eb6\" data-element_type=\"section\" data-e-type=\"section\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-50 elementor-top-column elementor-element elementor-element-8a3ea2b exad-glass-effect-no exad-sticky-section-no\" data-id=\"8a3ea2b\" data-element_type=\"column\" data-e-type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-e9223e0 exad-sticky-section-no exad-glass-effect-no elementor-widget elementor-widget-image\" data-id=\"e9223e0\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"image.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<img fetchpriority=\"high\" decoding=\"async\" width=\"500\" height=\"560\" src=\"https:\/\/www.ims-chips.de\/wp-content\/uploads\/2022\/10\/Canon-FPA3030i5at.jpg\" class=\"attachment-full size-full wp-image-9779\" alt=\"Neuer i-Line Stepper Canon FPA3030i5a\" srcset=\"https:\/\/www.ims-chips.de\/wp-content\/uploads\/2022\/10\/Canon-FPA3030i5at.jpg 500w, https:\/\/www.ims-chips.de\/wp-content\/uploads\/2022\/10\/Canon-FPA3030i5at-268x300.jpg 268w\" sizes=\"(max-width: 500px) 100vw, 500px\" \/>\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t<div class=\"elementor-column elementor-col-50 elementor-top-column elementor-element elementor-element-54997cb exad-glass-effect-no exad-sticky-section-no\" data-id=\"54997cb\" data-element_type=\"column\" data-e-type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-70f3d73 exad-sticky-section-no exad-glass-effect-no elementor-widget elementor-widget-text-editor\" data-id=\"70f3d73\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<p>Im Reinraum des IMS wurde im Juni mit<br \/>Mitteln des Landes Baden-W\u00fcrttemberg<br \/>eine neue Anlage f\u00fcr optische Lithografie in<br \/>Betrieb genommen. Der neue i-Line Stepper<br \/>Canon FPA3030i5a ersetzt die bisherige<br \/>Anlage Canon FPA3000i5+, die \u00fcber<br \/>20 Jahre lang ein wichtiger Bestandteil der<br \/>CMOS \u2013 Chipfertigung am IMS war. Mit<br \/>der Neubeschaffung steht nun wieder eine<br \/>Anlage auf dem neuesten Stand der Technik<br \/>zur Verf\u00fcgung. Zus\u00e4tzlich wurden dabei<br \/>auch erweiterte M\u00f6glichkeiten im Hinblick<br \/>auf aktuelle und zuk\u00fcnftige Aktivit\u00e4ten des<br \/>IMS geschaffen.<\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<section class=\"elementor-section elementor-top-section elementor-element elementor-element-73932d7 elementor-section-boxed elementor-section-height-default elementor-section-height-default exad-glass-effect-no exad-sticky-section-no\" data-id=\"73932d7\" data-element_type=\"section\" data-e-type=\"section\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-100 elementor-top-column elementor-element elementor-element-99fd582 exad-glass-effect-no exad-sticky-section-no\" data-id=\"99fd582\" data-element_type=\"column\" data-e-type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-a14e7c3 exad-sticky-section-no exad-glass-effect-no elementor-widget elementor-widget-text-editor\" data-id=\"a14e7c3\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<p>So kann der neue Stepper sowohl\u00a0<span style=\"font-size: inherit;\">Wafergr\u00f6\u00dfen von 150 mm Durchmesser als\u00a0<\/span><span style=\"font-size: inherit;\">auch mit 200 mm Durchmesser vollautomatisch\u00a0<\/span><span style=\"font-size: inherit;\">und mit hohem Durchsatz prozessieren;\u00a0<\/span><span style=\"font-size: inherit;\">die Umr\u00fcstung daf\u00fcr erfolgt mit nur wenigen\u00a0<\/span><span style=\"font-size: inherit;\">Handgriffen. Insbesondere f\u00fcr die aktuellen\u00a0<\/span><span style=\"font-size: inherit;\">Projekte des IMS im Bereich MEMS und\u00a0<\/span><span style=\"font-size: inherit;\">GaN wurde bei dieser Produktionsanlage\u00a0<\/span><span style=\"font-size: inherit;\">auf eine m\u00f6glichst gro\u00dfe Flexibilit\u00e4t bez\u00fcglich\u00a0<\/span><span style=\"font-size: inherit;\">der prozessierbaren Substrate geachtet,\u00a0<\/span><span style=\"font-size: inherit;\">so dass zum Beispiel die Dicke der zu belichtenden\u00a0<\/span><span style=\"font-size: inherit;\">Wafer in einem Bereich von 200 \u03bcm\u00a0<\/span><span style=\"font-size: inherit;\">bis 1200 \u03bcm m\u00f6glich ist.<\/span><\/p>\n<p>Der Canon FPA3030i5a Stepper ist zus\u00e4tzlich\u00a0mit einem Infrarot-Kamerasystem ausgestattet,\u00a0f\u00fcr das Silizium transparent ist.\u00a0Mit diesem sogenannten \u201aThrough Silicon\u00a0Alignment\u2018 \u2013 System k\u00f6nnen mit hoher\u00a0Genauigkeit Belichtungen auf Strukturen justiert\u00a0und ausgerichtet werden, die sich auf<br \/>der R\u00fcckseite des Wafers befinden. Dies ist\u00a0insbesondere f\u00fcr Anwendungen im Bereich\u00a0MEMS von hoher Bedeutung.<\/p>\n<p>Abgestimmt auf diese neuen M\u00f6glichkeiten\u00a0konnte ebenfalls mit Landesmitteln ein neues\u00a0Resist Track der Firma Osiris beschafft werden,\u00a0das Wafer mit Durchmessern von\u00a0150 mm, 200 mm und 300 mm vollautomatisch\u00a0mit Fotoresist beschichten und entwickeln\u00a0kann. Auch diese Anlage wird noch in diesem\u00a0Jahr installiert. Auch hier wurde auf gr\u00f6\u00dftm\u00f6gliche\u00a0Flexibilit\u00e4t bei der Beschaffenheit<br \/>der zu prozessierenden Wafer geachtet.<\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<section class=\"elementor-section elementor-top-section elementor-element elementor-element-2c15bea elementor-section-boxed elementor-section-height-default elementor-section-height-default exad-glass-effect-no exad-sticky-section-no\" data-id=\"2c15bea\" data-element_type=\"section\" data-e-type=\"section\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-100 elementor-top-column elementor-element elementor-element-e25f7e9 exad-glass-effect-no exad-sticky-section-no\" data-id=\"e25f7e9\" data-element_type=\"column\" data-e-type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap\">\n\t\t\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<section class=\"elementor-section elementor-top-section elementor-element elementor-element-b1baa35 elementor-section-boxed elementor-section-height-default elementor-section-height-default exad-glass-effect-no exad-sticky-section-no\" data-id=\"b1baa35\" data-element_type=\"section\" data-e-type=\"section\" data-settings=\"{&quot;background_background&quot;:&quot;classic&quot;}\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-100 elementor-top-column elementor-element elementor-element-f8b7cf4 exad-glass-effect-no exad-sticky-section-no\" data-id=\"f8b7cf4\" data-element_type=\"column\" data-e-type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-e365f85 exad-sticky-section-no exad-glass-effect-no elementor-widget elementor-widget-text-editor\" data-id=\"e365f85\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<strong>Kontakt:<\/strong>\n\n\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<section class=\"elementor-section elementor-inner-section elementor-element elementor-element-23ff211 elementor-section-boxed elementor-section-height-default elementor-section-height-default exad-glass-effect-no exad-sticky-section-no\" data-id=\"23ff211\" data-element_type=\"section\" data-e-type=\"section\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-33 elementor-inner-column elementor-element elementor-element-150bcf0 exad-glass-effect-no exad-sticky-section-no\" data-id=\"150bcf0\" data-element_type=\"column\" data-e-type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-a6fd8d0 exad-sticky-section-no exad-glass-effect-no elementor-widget elementor-widget-text-editor\" data-id=\"a6fd8d0\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<p><strong>Holger Sailer<\/strong><\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t<div class=\"elementor-column elementor-col-33 elementor-inner-column elementor-element elementor-element-4cd6552 exad-glass-effect-no exad-sticky-section-no\" data-id=\"4cd6552\" data-element_type=\"column\" data-e-type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-b2715cb exad-sticky-section-no exad-glass-effect-no elementor-widget elementor-widget-text-editor\" data-id=\"b2715cb\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<p>Tel: +49 711 21855\u00a0 457<\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t<div class=\"elementor-column elementor-col-33 elementor-inner-column elementor-element elementor-element-b5caf70 exad-glass-effect-no exad-sticky-section-no\" data-id=\"b5caf70\" data-element_type=\"column\" data-e-type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-c05301a exad-sticky-section-no exad-glass-effect-no elementor-widget elementor-widget-text-editor\" data-id=\"c05301a\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<p><a href=\"mailto:sailer@ims-chips.de\">sailer@ims-chips.de<\/a><\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<\/div>\n\t\t","protected":false},"excerpt":{"rendered":"<p>Mit der Inbetriebnahme des neuen i-Line<br \/>\nSteppers Canon FPA3030i5a f\u00fcr optische<br \/>\nLithografie konnte im Juni ein weiterer<br \/>\nMeilenstein bei der Erweiterung<br \/>\nder IMS \u2013 Linie f\u00fcr 200 mm Wafer<br \/>\nerreicht werden. Damit steht nun eine<br \/>\nProduktionsanlage auf dem neuesten<br \/>\nStand der Technik zur Verf\u00fcgung, die<br \/>\ndem IMS zahlreiche neue M\u00f6glichkeiten<br \/>\nzur Entwicklung neuer Prozesse f\u00fcr die Zukunft er\u00f6ffnet.<\/p>\n","protected":false},"author":1,"featured_media":9779,"comment_status":"closed","ping_status":"closed","sticky":false,"template":"","format":"standard","meta":{"footnotes":""},"categories":[19],"tags":[21],"class_list":["post-9777","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-newsletter-2-2022","tag-i-line-stepper-canon-fpa3030i5a"],"yoast_head":"<!-- This site is optimized with the Yoast SEO plugin v27.8 - https:\/\/yoast.com\/product\/yoast-seo-wordpress\/ -->\n<title>Neuer i-Line Stepper Canon FPA3030i5a in Betrieb - Institut f\u00fcr Mikroelektronik Stuttgart<\/title>\n<meta name=\"description\" content=\"Qsens Zukunftscluster - QuantencomputerCanon FPA3030i5aCanon FPA3030i5a\" \/>\n<meta name=\"robots\" content=\"index, follow, max-snippet:-1, max-image-preview:large, max-video-preview:-1\" \/>\n<link rel=\"canonical\" href=\"https:\/\/www.ims-chips.de\/?p=9777\" \/>\n<meta property=\"og:locale\" content=\"de_DE\" \/>\n<meta property=\"og:type\" content=\"article\" \/>\n<meta property=\"og:title\" content=\"Neuer i-Line Stepper Canon FPA3030i5a in Betrieb - 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