{"id":1659,"date":"2018-10-01T14:54:39","date_gmt":"2018-10-01T12:54:39","guid":{"rendered":"https:\/\/start.ims-chips.de\/?p=1659"},"modified":"2025-01-15T10:29:34","modified_gmt":"2025-01-15T09:29:34","slug":"tapes3","status":"publish","type":"post","link":"https:\/\/www.ims-chips.de\/?p=1659","title":{"rendered":"TAPES3"},"content":{"rendered":"\t\t<div data-elementor-type=\"wp-post\" data-elementor-id=\"1659\" class=\"elementor elementor-1659\">\n\t\t\t\t\t\t<section class=\"elementor-section elementor-top-section elementor-element elementor-element-f8be919 elementor-section-boxed elementor-section-height-default elementor-section-height-default exad-glass-effect-no exad-sticky-section-no\" data-id=\"f8be919\" data-element_type=\"section\" data-e-type=\"section\" data-settings=\"{&quot;background_background&quot;:&quot;classic&quot;}\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-100 elementor-top-column elementor-element elementor-element-c0ea536 exad-glass-effect-no exad-sticky-section-no\" data-id=\"c0ea536\" data-element_type=\"column\" data-e-type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-672976b exad-sticky-section-no exad-glass-effect-no elementor-widget elementor-widget-heading\" data-id=\"672976b\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t<h5 class=\"elementor-heading-title elementor-size-default\">Projekte<\/h5>\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<section class=\"elementor-section elementor-top-section elementor-element elementor-element-49971e9 elementor-section-boxed elementor-section-height-default elementor-section-height-default exad-glass-effect-no exad-sticky-section-no\" data-id=\"49971e9\" data-element_type=\"section\" data-e-type=\"section\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-100 elementor-top-column elementor-element elementor-element-066e9d7 exad-glass-effect-no exad-sticky-section-no\" data-id=\"066e9d7\" data-element_type=\"column\" data-e-type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-31d8acf exad-sticky-section-no exad-glass-effect-no elementor-widget elementor-widget-heading\" data-id=\"31d8acf\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t<h2 class=\"elementor-heading-title elementor-size-default\">TAPES3 - Technologien f\u00fcr die n\u00e4chste Generation h\u00f6chstintegrierter Mikroelektronik<\/h2>\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<section class=\"elementor-section elementor-top-section elementor-element elementor-element-2eaae73 elementor-section-boxed elementor-section-height-default elementor-section-height-default exad-glass-effect-no exad-sticky-section-no\" data-id=\"2eaae73\" data-element_type=\"section\" data-e-type=\"section\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-50 elementor-top-column elementor-element elementor-element-355c81e exad-glass-effect-no exad-sticky-section-no\" data-id=\"355c81e\" data-element_type=\"column\" data-e-type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-f65320c exad-sticky-section-no exad-glass-effect-no elementor-widget elementor-widget-image\" data-id=\"f65320c\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"image.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<img fetchpriority=\"high\" decoding=\"async\" width=\"345\" height=\"230\" src=\"https:\/\/www.ims-chips.de\/wp-content\/uploads\/2020\/10\/Projekte_Bild_TAPES3_20.jpg\" class=\"attachment-large size-large wp-image-1609\" alt=\"Projekt TAPES3 2020\" srcset=\"https:\/\/www.ims-chips.de\/wp-content\/uploads\/2020\/10\/Projekte_Bild_TAPES3_20.jpg 345w, https:\/\/www.ims-chips.de\/wp-content\/uploads\/2020\/10\/Projekte_Bild_TAPES3_20-300x200.jpg 300w\" sizes=\"(max-width: 345px) 100vw, 345px\" \/>\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-d4018b0 exad-sticky-section-no exad-glass-effect-no elementor-widget elementor-widget-text-editor\" data-id=\"d4018b0\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<p>Projektzeitraum: 01.10.2018-31.01.2022<br>Gef\u00f6rdert von der EU<br>F\u00f6rderkennzeichen: 783247<br><\/p>\n<p><br><\/p>\n<p>Gef\u00f6rdert vom BMBF<br>F\u00f6rderkennzeichen: 16ESE0289<\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t<div class=\"elementor-column elementor-col-50 elementor-top-column elementor-element elementor-element-a6b7c77 exad-glass-effect-no exad-sticky-section-no\" data-id=\"a6b7c77\" data-element_type=\"column\" data-e-type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-06f2015 exad-sticky-section-no exad-glass-effect-no elementor-widget elementor-widget-text-editor\" data-id=\"06f2015\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<p>Das Hauptziel des Projektes TAPES3 besteht darin, Lithografie, Messtechnik, EUV-Maskentechnologie, Ger\u00e4te und Prozessmodule f\u00fcr den 3 nm Technologieknoten zu entwickeln und zu demonstrieren. Dies ist mit verf\u00fcgbaren EUV \/ NA-0,33-Scannern sowie mit dem Systemdesign und der Integration eines neuen Hyper-NA-EUV-Lithographietools geplant, um bei 3 nm mehr Einzelbelichtungen zu erm\u00f6glichen, um komplexe integrierte Schaltungen zu erzeugen.<\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<section class=\"elementor-section elementor-top-section elementor-element elementor-element-dfedb5f elementor-section-boxed elementor-section-height-default elementor-section-height-default exad-glass-effect-no exad-sticky-section-no\" data-id=\"dfedb5f\" data-element_type=\"section\" data-e-type=\"section\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-100 elementor-top-column elementor-element elementor-element-005efcf exad-glass-effect-no exad-sticky-section-no\" data-id=\"005efcf\" data-element_type=\"column\" data-e-type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-291017e exad-sticky-section-no exad-glass-effect-no elementor-widget elementor-widget-text-editor\" data-id=\"291017e\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<p>Das TAPES3-Projekt bezieht sich auf das ECSEL-Arbeitsprogramm \u201eEquipment, Material and Manufacturing\u201c. Es adressiert und zielt auf die gro\u00dfen Herausforderungen von &#8222;More Moore Equipment and Materials for Sub-10-nm-Technology&#8220; ab, indem es die Anforderungen und L\u00f6sungen f\u00fcr den 3-nm-Knoten untersucht. Das Projekt ber\u00fchrt den Kern der Fortf\u00fchrung des Moore&#8217;schen Gesetzes. <br \/>Das Institut f\u00fcr Mikroelektronik Stuttgart (IMS CHIPS) wird in den Arbeitspaketen Lithografie und EUV Maskeninfrastruktur mitwirken. Im Arbeitspaket Lithographie sollen ultragenaue Diffraktive Optische Elemente (DOE) f\u00fcr die Oberfl\u00e4chenpr\u00fcfung von EUV-Spiegeln entwickelt werden, w\u00e4hrend das IMS im Paket EUV Maskeninfrastruktur neue Konzepte zu Masken mit alternativen Absorbern erforschen wird.<br \/>Das ECSEL-Projekt wird von einem parallel laufenden BMBF-Projekt begleitet.<\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<section class=\"elementor-section elementor-top-section elementor-element elementor-element-ffc1f92 elementor-section-boxed elementor-section-height-default elementor-section-height-default exad-glass-effect-no exad-sticky-section-no\" data-id=\"ffc1f92\" data-element_type=\"section\" data-e-type=\"section\" data-settings=\"{&quot;background_background&quot;:&quot;classic&quot;}\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-100 elementor-top-column elementor-element elementor-element-908014d exad-glass-effect-no exad-sticky-section-no\" data-id=\"908014d\" data-element_type=\"column\" data-e-type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-7805a6f exad-sticky-section-no exad-glass-effect-no elementor-widget elementor-widget-text-editor\" data-id=\"7805a6f\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<p>Mehr \u00fcber das Forschungsprojekt erfahren Sie hier: <a href=\"https:\/\/cordis.europa.eu\/project\/rcn\/216119_en.html\" target=\"_blank\" rel=\"noopener\">https:\/\/cordis.europa.eu\/project\/rcn\/216119_en.html<\/a><\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-09c7dec exad-sticky-section-no exad-glass-effect-no elementor-widget elementor-widget-text-editor\" data-id=\"09c7dec\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<p><strong>Kontakt:<\/strong><\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<section class=\"elementor-section elementor-top-section elementor-element elementor-element-b1baa35 elementor-section-boxed elementor-section-height-default elementor-section-height-default exad-glass-effect-no exad-sticky-section-no\" data-id=\"b1baa35\" data-element_type=\"section\" data-e-type=\"section\" data-settings=\"{&quot;background_background&quot;:&quot;classic&quot;}\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-33 elementor-top-column elementor-element elementor-element-f8b7cf4 exad-glass-effect-no exad-sticky-section-no\" data-id=\"f8b7cf4\" data-element_type=\"column\" data-e-type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-e365f85 exad-sticky-section-no exad-glass-effect-no elementor-widget elementor-widget-text-editor\" data-id=\"e365f85\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<p><strong>Sandra Naasz<\/strong><\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t<div class=\"elementor-column elementor-col-33 elementor-top-column elementor-element elementor-element-98fe33a exad-glass-effect-no exad-sticky-section-no\" data-id=\"98fe33a\" data-element_type=\"column\" data-e-type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-b1b68c0 exad-sticky-section-no exad-glass-effect-no elementor-widget elementor-widget-text-editor\" data-id=\"b1b68c0\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<p>Tel: +49 711 21855 426<\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t<div class=\"elementor-column elementor-col-33 elementor-top-column elementor-element elementor-element-54d5446 exad-glass-effect-no exad-sticky-section-no\" data-id=\"54d5446\" data-element_type=\"column\" data-e-type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-d3d1d11 exad-sticky-section-no exad-glass-effect-no elementor-widget elementor-widget-text-editor\" data-id=\"d3d1d11\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<a href=\"mailto:naasz@ims-chips.de\">E-Mail<\/a>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<\/div>\n\t\t","protected":false},"excerpt":{"rendered":"<p>Projekte TAPES3 &#8211; Technologien f\u00fcr die n\u00e4chste Generation h\u00f6chstintegrierter Mikroelektronik Projektzeitraum: 01.10.2018-31.01.2022Gef\u00f6rdert von der EUF\u00f6rderkennzeichen: 783247 Gef\u00f6rdert vom BMBFF\u00f6rderkennzeichen: 16ESE0289 Das Hauptziel des Projektes TAPES3 besteht darin, Lithografie, Messtechnik, EUV-Maskentechnologie, Ger\u00e4te und Prozessmodule f\u00fcr den 3 nm Technologieknoten zu entwickeln und zu demonstrieren. Dies ist mit verf\u00fcgbaren EUV \/ NA-0,33-Scannern [&hellip;]<\/p>\n","protected":false},"author":1,"featured_media":1609,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"footnotes":""},"categories":[41],"tags":[],"class_list":["post-1659","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-projekte-archiv-2022"],"yoast_head":"<!-- This site is optimized with the Yoast SEO plugin v27.4 - https:\/\/yoast.com\/product\/yoast-seo-wordpress\/ -->\n<title>TAPES3 - Institut f\u00fcr Mikroelektronik Stuttgart<\/title>\n<meta name=\"description\" content=\"Mikroelektronik und Nanotechnologien: Integrierte Schaltungen &amp; Systeme, Bildgebende Sensorik, Halbleiterintegration, M(E)MS-Technologien, Nanostrukturierung\" \/>\n<meta name=\"robots\" content=\"index, follow, max-snippet:-1, max-image-preview:large, max-video-preview:-1\" \/>\n<link rel=\"canonical\" href=\"https:\/\/www.ims-chips.de\/?p=1659\" \/>\n<meta property=\"og:locale\" content=\"de_DE\" \/>\n<meta property=\"og:type\" content=\"article\" \/>\n<meta property=\"og:title\" content=\"TAPES3 - 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