{"id":11792,"date":"2024-08-29T08:46:17","date_gmt":"2024-08-29T06:46:17","guid":{"rendered":"https:\/\/www.ims-chips.de\/?p=11792"},"modified":"2025-01-14T10:33:08","modified_gmt":"2025-01-14T09:33:08","slug":"dry-processing-workshop-plasma-atomic-scale-process-techniques-2024-stuttgart","status":"publish","type":"post","link":"https:\/\/www.ims-chips.de\/?p=11792","title":{"rendered":"DRY PROCESSING WORKSHOP: Plasma &amp; Atomic Scale Process Techniques 2024, Stuttgart"},"content":{"rendered":"\t\t<div data-elementor-type=\"wp-post\" data-elementor-id=\"11792\" class=\"elementor elementor-11792\">\n\t\t\t\t\t\t<section class=\"elementor-section elementor-top-section elementor-element elementor-element-8e921d8 elementor-section-boxed elementor-section-height-default elementor-section-height-default exad-glass-effect-no exad-sticky-section-no\" data-id=\"8e921d8\" data-element_type=\"section\" data-e-type=\"section\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-100 elementor-top-column elementor-element elementor-element-8898761 exad-glass-effect-no exad-sticky-section-no\" data-id=\"8898761\" data-element_type=\"column\" data-e-type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-13410c2 exad-sticky-section-no exad-glass-effect-no elementor-widget elementor-widget-heading\" data-id=\"13410c2\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t<h3 class=\"elementor-heading-title elementor-size-default\">DRY PROCESSING WORKSHOP 2024<\/h3>\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<section class=\"elementor-section elementor-top-section elementor-element elementor-element-f0a2152 elementor-section-boxed elementor-section-height-default elementor-section-height-default exad-glass-effect-no exad-sticky-section-no\" data-id=\"f0a2152\" data-element_type=\"section\" data-e-type=\"section\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-50 elementor-top-column elementor-element elementor-element-47cb302 exad-glass-effect-no exad-sticky-section-no\" data-id=\"47cb302\" data-element_type=\"column\" data-e-type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-c678bc4 exad-sticky-section-no exad-glass-effect-no elementor-widget elementor-widget-image\" data-id=\"c678bc4\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"image.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<img fetchpriority=\"high\" decoding=\"async\" width=\"344\" height=\"211\" src=\"https:\/\/www.ims-chips.de\/wp-content\/uploads\/2024\/08\/News_Bild_Dry_Processing_WS_2024.jpg\" class=\"attachment-full size-full wp-image-11794\" alt=\"DRY PROCESSING WORKSHOP 2024\" srcset=\"https:\/\/www.ims-chips.de\/wp-content\/uploads\/2024\/08\/News_Bild_Dry_Processing_WS_2024.jpg 344w, https:\/\/www.ims-chips.de\/wp-content\/uploads\/2024\/08\/News_Bild_Dry_Processing_WS_2024-300x184.jpg 300w\" sizes=\"(max-width: 344px) 100vw, 344px\" \/>\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-2ab08c9 exad-sticky-section-no exad-glass-effect-no elementor-widget elementor-widget-text-editor\" data-id=\"2ab08c9\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<p>24.\u2013 25. September 2024, Stuttgart.<\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t<div class=\"elementor-column elementor-col-50 elementor-top-column elementor-element elementor-element-a38a922 exad-glass-effect-no exad-sticky-section-no\" data-id=\"a38a922\" data-element_type=\"column\" data-e-type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-e12bca9 exad-sticky-section-no exad-glass-effect-no elementor-widget elementor-widget-text-editor\" data-id=\"e12bca9\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<p>Der Dry Processing Workshop ist ein interaktiver Workshop f\u00fcr Nutzer von Oxford Instruments Plasma Technology-Ger\u00e4ten. Der von Oxford Instruments organisierte Workshop wird vom ZAQuant und dem IMS CHIPS mitveranstaltet. <br \/>Die 2-t\u00e4gige Veranstaltung wird an der Universit\u00e4t Stuttgart durchgef\u00fchrt.<\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<section class=\"elementor-section elementor-top-section elementor-element elementor-element-e473d51 elementor-section-boxed elementor-section-height-default elementor-section-height-default exad-glass-effect-no exad-sticky-section-no\" data-id=\"e473d51\" data-element_type=\"section\" data-e-type=\"section\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-100 elementor-top-column elementor-element elementor-element-86d5411 exad-glass-effect-no exad-sticky-section-no\" data-id=\"86d5411\" data-element_type=\"column\" data-e-type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-4c46665 exad-sticky-section-no exad-glass-effect-no elementor-widget elementor-widget-text-editor\" data-id=\"4c46665\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<p><strong>Plasma Processing Day<\/strong>, Dienstag 24. September 2024<\/p><p>10:15 &#8211; 10:30 Uhr<br \/><strong>IMS CHIPS: Introductory presentation<\/strong><br \/>Mathias Kaschel<\/p><p>11:45 &#8211; 12:15 Uhr<br \/><strong>Dry etching of GaN-devices for power electronics and patterning using MEMS processes<\/strong><br \/>Matthias Moser &amp; Martin Siebert<\/p><p><strong>Atomic Scale Processing Day<\/strong>, Mittwoch 25. September 2024<\/p><p>15:00 &#8211; 15:30 Uhr<br \/><strong>Dry etching of Silicon and Silicon Nitride waveguides using electron beam lithography<\/strong><br \/>Markus Greul<\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<section class=\"elementor-section elementor-top-section elementor-element elementor-element-49b274a elementor-section-boxed elementor-section-height-default elementor-section-height-default exad-glass-effect-no exad-sticky-section-no\" data-id=\"49b274a\" data-element_type=\"section\" data-e-type=\"section\" data-settings=\"{&quot;background_background&quot;:&quot;classic&quot;}\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-100 elementor-top-column elementor-element elementor-element-4fcfc74 exad-glass-effect-no exad-sticky-section-no\" data-id=\"4fcfc74\" data-element_type=\"column\" data-e-type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-70de8ce exad-sticky-section-no exad-glass-effect-no elementor-widget elementor-widget-text-editor\" data-id=\"70de8ce\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<p>Weitere Informationen zum DRY PROCESSING WORKSHOP 2024 finden Sie auf folgender Website:\u00a0 <a href=\"https:\/\/www.oxinst.com\/events\/dry-processing-workshop-2024\">https:\/\/www.oxinst.com\/events\/dry-processing-workshop-2024<\/a><\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<section class=\"elementor-section elementor-top-section elementor-element elementor-element-213b5b2 elementor-section-boxed elementor-section-height-default elementor-section-height-default exad-glass-effect-no exad-sticky-section-no\" data-id=\"213b5b2\" data-element_type=\"section\" data-e-type=\"section\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-100 elementor-top-column elementor-element elementor-element-702fafb exad-glass-effect-no exad-sticky-section-no\" data-id=\"702fafb\" data-element_type=\"column\" data-e-type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-eaed0d7 exad-sticky-section-no exad-glass-effect-no elementor-widget elementor-widget-spacer\" data-id=\"eaed0d7\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"spacer.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<div class=\"elementor-spacer\">\n\t\t\t<div class=\"elementor-spacer-inner\"><\/div>\n\t\t<\/div>\n\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<\/div>\n\t\t","protected":false},"excerpt":{"rendered":"<p>24.-25.09.2024. Das IMS ist als Mitveranstalter mit drei Vortr\u00e4gen bei dem Workshop vertreten.<\/p>\n","protected":false},"author":3,"featured_media":11794,"comment_status":"closed","ping_status":"closed","sticky":false,"template":"","format":"standard","meta":{"footnotes":""},"categories":[7],"tags":[],"class_list":["post-11792","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-archiv"],"yoast_head":"<!-- This site is optimized with the Yoast SEO plugin v27.6 - https:\/\/yoast.com\/product\/yoast-seo-wordpress\/ -->\n<title>DRY PROCESSING WORKSHOP: Plasma &amp; Atomic Scale Process Techniques 2024, Stuttgart - Institut f\u00fcr Mikroelektronik Stuttgart<\/title>\n<meta name=\"description\" content=\"24.-25.09.2024. 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Das IMS ist als Mitveranstalter mit drei Vortr\u00e4gen bei dem Workshop vertreten.","robots":{"index":"index","follow":"follow","max-snippet":"max-snippet:-1","max-image-preview":"max-image-preview:large","max-video-preview":"max-video-preview:-1"},"canonical":"https:\/\/www.ims-chips.de\/?p=11792","og_locale":"de_DE","og_type":"article","og_title":"DRY PROCESSING WORKSHOP: Plasma &amp; Atomic Scale Process Techniques 2024, Stuttgart - Institut f\u00fcr Mikroelektronik Stuttgart","og_description":"24.-25.09.2024. Das IMS ist als Mitveranstalter mit drei Vortr\u00e4gen bei dem Workshop vertreten.","og_url":"https:\/\/www.ims-chips.de\/?p=11792","og_site_name":"Institut f\u00fcr Mikroelektronik Stuttgart","article_published_time":"2024-08-29T06:46:17+00:00","article_modified_time":"2025-01-14T09:33:08+00:00","og_image":[{"width":344,"height":211,"url":"https:\/\/www.ims-chips.de\/wp-content\/uploads\/2024\/08\/News_Bild_Dry_Processing_WS_2024.jpg","type":"image\/jpeg"}],"author":"deh","twitter_card":"summary_large_image","twitter_misc":{"Verfasst von":"deh","Gesch\u00e4tzte Lesezeit":"1\u00a0Minute"},"schema":{"@context":"https:\/\/schema.org","@graph":[{"@type":"Article","@id":"https:\/\/www.ims-chips.de\/?p=11792#article","isPartOf":{"@id":"https:\/\/www.ims-chips.de\/?p=11792"},"author":{"name":"deh","@id":"https:\/\/www.ims-chips.de\/#\/schema\/person\/f55c237fcc0f31566d53d4b9c68f9467"},"headline":"DRY PROCESSING WORKSHOP: Plasma &amp; Atomic Scale Process Techniques 2024, Stuttgart","datePublished":"2024-08-29T06:46:17+00:00","dateModified":"2025-01-14T09:33:08+00:00","mainEntityOfPage":{"@id":"https:\/\/www.ims-chips.de\/?p=11792"},"wordCount":129,"publisher":{"@id":"https:\/\/www.ims-chips.de\/#organization"},"image":{"@id":"https:\/\/www.ims-chips.de\/?p=11792#primaryimage"},"thumbnailUrl":"https:\/\/www.ims-chips.de\/wp-content\/uploads\/2024\/08\/News_Bild_Dry_Processing_WS_2024.jpg","articleSection":["Archiv"],"inLanguage":"de"},{"@type":"WebPage","@id":"https:\/\/www.ims-chips.de\/?p=11792","url":"https:\/\/www.ims-chips.de\/?p=11792","name":"DRY PROCESSING WORKSHOP: Plasma &amp; Atomic Scale Process Techniques 2024, Stuttgart - Institut f\u00fcr Mikroelektronik Stuttgart","isPartOf":{"@id":"https:\/\/www.ims-chips.de\/#website"},"primaryImageOfPage":{"@id":"https:\/\/www.ims-chips.de\/?p=11792#primaryimage"},"image":{"@id":"https:\/\/www.ims-chips.de\/?p=11792#primaryimage"},"thumbnailUrl":"https:\/\/www.ims-chips.de\/wp-content\/uploads\/2024\/08\/News_Bild_Dry_Processing_WS_2024.jpg","datePublished":"2024-08-29T06:46:17+00:00","dateModified":"2025-01-14T09:33:08+00:00","description":"24.-25.09.2024. Das IMS ist als Mitveranstalter mit drei Vortr\u00e4gen bei dem Workshop vertreten.","breadcrumb":{"@id":"https:\/\/www.ims-chips.de\/?p=11792#breadcrumb"},"inLanguage":"de","potentialAction":[{"@type":"ReadAction","target":["https:\/\/www.ims-chips.de\/?p=11792"]}]},{"@type":"ImageObject","inLanguage":"de","@id":"https:\/\/www.ims-chips.de\/?p=11792#primaryimage","url":"https:\/\/www.ims-chips.de\/wp-content\/uploads\/2024\/08\/News_Bild_Dry_Processing_WS_2024.jpg","contentUrl":"https:\/\/www.ims-chips.de\/wp-content\/uploads\/2024\/08\/News_Bild_Dry_Processing_WS_2024.jpg","width":344,"height":211,"caption":"DRY PROCESSING WORKSHOP 2024"},{"@type":"BreadcrumbList","@id":"https:\/\/www.ims-chips.de\/?p=11792#breadcrumb","itemListElement":[{"@type":"ListItem","position":1,"name":"Startseite","item":"https:\/\/www.ims-chips.de\/"},{"@type":"ListItem","position":2,"name":"DRY PROCESSING WORKSHOP: Plasma &amp; Atomic Scale Process Techniques 2024, Stuttgart"}]},{"@type":"WebSite","@id":"https:\/\/www.ims-chips.de\/#website","url":"https:\/\/www.ims-chips.de\/","name":"Institut f\u00fcr Mikroelektronik Stuttgart","description":"","publisher":{"@id":"https:\/\/www.ims-chips.de\/#organization"},"potentialAction":[{"@type":"SearchAction","target":{"@type":"EntryPoint","urlTemplate":"https:\/\/www.ims-chips.de\/?s={search_term_string}"},"query-input":{"@type":"PropertyValueSpecification","valueRequired":true,"valueName":"search_term_string"}}],"inLanguage":"de"},{"@type":"Organization","@id":"https:\/\/www.ims-chips.de\/#organization","name":"Institut f\u00fcr Mikroelektronik Stuttgart","alternateName":"IMS CHIPS","url":"https:\/\/www.ims-chips.de\/","logo":{"@type":"ImageObject","inLanguage":"de","@id":"https:\/\/www.ims-chips.de\/#\/schema\/logo\/image\/","url":"https:\/\/www.ims-chips.de\/wp-content\/uploads\/2020\/09\/logo_ims.png","contentUrl":"https:\/\/www.ims-chips.de\/wp-content\/uploads\/2020\/09\/logo_ims.png","width":262,"height":65,"caption":"Institut f\u00fcr Mikroelektronik Stuttgart"},"image":{"@id":"https:\/\/www.ims-chips.de\/#\/schema\/logo\/image\/"}},{"@type":"Person","@id":"https:\/\/www.ims-chips.de\/#\/schema\/person\/f55c237fcc0f31566d53d4b9c68f9467","name":"deh"}]}},"_links":{"self":[{"href":"https:\/\/www.ims-chips.de\/index.php?rest_route=\/wp\/v2\/posts\/11792","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.ims-chips.de\/index.php?rest_route=\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/www.ims-chips.de\/index.php?rest_route=\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/www.ims-chips.de\/index.php?rest_route=\/wp\/v2\/users\/3"}],"replies":[{"embeddable":true,"href":"https:\/\/www.ims-chips.de\/index.php?rest_route=%2Fwp%2Fv2%2Fcomments&post=11792"}],"version-history":[{"count":1,"href":"https:\/\/www.ims-chips.de\/index.php?rest_route=\/wp\/v2\/posts\/11792\/revisions"}],"predecessor-version":[{"id":12261,"href":"https:\/\/www.ims-chips.de\/index.php?rest_route=\/wp\/v2\/posts\/11792\/revisions\/12261"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/www.ims-chips.de\/index.php?rest_route=\/wp\/v2\/media\/11794"}],"wp:attachment":[{"href":"https:\/\/www.ims-chips.de\/index.php?rest_route=%2Fwp%2Fv2%2Fmedia&parent=11792"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.ims-chips.de\/index.php?rest_route=%2Fwp%2Fv2%2Fcategories&post=11792"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.ims-chips.de\/index.php?rest_route=%2Fwp%2Fv2%2Ftags&post=11792"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}