{"id":983,"date":"2020-09-11T15:39:35","date_gmt":"2020-09-11T13:39:35","guid":{"rendered":"https:\/\/start.ims-chips.de\/?page_id=983"},"modified":"2025-04-22T14:01:16","modified_gmt":"2025-04-22T12:01:16","slug":"nanostrukturierung","status":"publish","type":"page","link":"https:\/\/www.ims-chips.de\/?page_id=983","title":{"rendered":"Nanostrukturierung"},"content":{"rendered":"\t\t<div data-elementor-type=\"wp-page\" data-elementor-id=\"983\" class=\"elementor elementor-983\">\n\t\t\t\t\t\t<section class=\"elementor-section elementor-top-section elementor-element elementor-element-351bb3d elementor-section-boxed elementor-section-height-default elementor-section-height-default exad-glass-effect-no exad-sticky-section-no\" data-id=\"351bb3d\" data-element_type=\"section\" data-e-type=\"section\" data-settings=\"{&quot;background_background&quot;:&quot;classic&quot;,&quot;shape_divider_bottom&quot;:&quot;curve&quot;,&quot;shape_divider_bottom_negative&quot;:&quot;yes&quot;}\">\n\t\t\t\t\t\t\t<div class=\"elementor-background-overlay\"><\/div>\n\t\t\t\t\t\t<div class=\"elementor-shape elementor-shape-bottom\" aria-hidden=\"true\" data-negative=\"true\">\n\t\t\t<svg xmlns=\"http:\/\/www.w3.org\/2000\/svg\" viewBox=\"0 0 1000 100\" preserveAspectRatio=\"none\">\n\t<path class=\"elementor-shape-fill\" d=\"M500,97C126.7,96.3,0.8,19.8,0,0v100l1000,0V1C1000,19.4,873.3,97.8,500,97z\"\/>\n<\/svg>\t\t<\/div>\n\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-100 elementor-top-column elementor-element elementor-element-531617f3 exad-glass-effect-no exad-sticky-section-no\" data-id=\"531617f3\" data-element_type=\"column\" data-e-type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-37b1b54 exad-sticky-section-no exad-glass-effect-no elementor-widget elementor-widget-heading\" data-id=\"37b1b54\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t<h2 class=\"elementor-heading-title elementor-size-small\">Nanostrukturierung<\/h2>\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<section class=\"elementor-section elementor-top-section elementor-element elementor-element-30a70ee3 elementor-section-boxed elementor-section-height-default elementor-section-height-default exad-glass-effect-no exad-sticky-section-no\" data-id=\"30a70ee3\" data-element_type=\"section\" data-e-type=\"section\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-wide\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-50 elementor-top-column elementor-element elementor-element-3b73c05b exad-glass-effect-no exad-sticky-section-no\" data-id=\"3b73c05b\" data-element_type=\"column\" data-e-type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-b1c94a1 exad-sticky-section-no exad-glass-effect-no elementor-widget elementor-widget-image\" data-id=\"b1c94a1\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"image.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<img fetchpriority=\"high\" decoding=\"async\" width=\"608\" height=\"389\" src=\"https:\/\/www.ims-chips.de\/wp-content\/uploads\/2020\/09\/GF_5_Nano_20140213_Ebeam_Vistec_SB4050_IMG_1370_klein.jpg\" class=\"attachment-large size-large wp-image-1234\" alt=\"Mitarbeiter im Reinraum bei wissenschaftlicher Arbeit\" srcset=\"https:\/\/www.ims-chips.de\/wp-content\/uploads\/2020\/09\/GF_5_Nano_20140213_Ebeam_Vistec_SB4050_IMG_1370_klein.jpg 608w, https:\/\/www.ims-chips.de\/wp-content\/uploads\/2020\/09\/GF_5_Nano_20140213_Ebeam_Vistec_SB4050_IMG_1370_klein-300x192.jpg 300w\" sizes=\"(max-width: 608px) 100vw, 608px\" \/>\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t<div class=\"elementor-column elementor-col-50 elementor-top-column elementor-element elementor-element-40e11d8c exad-glass-effect-no exad-sticky-section-no\" data-id=\"40e11d8c\" data-element_type=\"column\" data-e-type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-465e0f06 exad-sticky-section-no exad-glass-effect-no elementor-widget elementor-widget-icon-box\" data-id=\"465e0f06\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"icon-box.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<div class=\"elementor-icon-box-wrapper\">\n\n\t\t\t\n\t\t\t\t\t\t<div class=\"elementor-icon-box-content\">\n\n\t\t\t\t\n\t\t\t\t\t\t\t\t\t<p class=\"elementor-icon-box-description\">\n\t\t\t\t\t\tIMS hat zwischenzeitlich mehr als 30 Jahre Erfahrung im Bereich der Elektronenstrahllithografie f\u00fcr die Herstellung hochaufgel\u00f6ster, komplexer Strukturen. Aktuell arbeiten wir mit der dritten Ger\u00e4tegeneration, bestehend aus zwei Formstrahlschreibern von Vistec f\u00fcr Substratgr\u00f6\u00dfen zwischen 150 mm und 450 mm. Mit der dazugeh\u00f6rigen Prozess-Infrastruktur fertigen wir z. B. Nano-Imprint Master, optische Elemente und Masken f\u00fcr h\u00f6chste Anspr\u00fcche auf industriellem Niveau. <br>\nAls Erg\u00e4nzung zur Elektronenstrahllithografie betreiben wir zwei Laser-Direktschreibesysteme (Aufl\u00f6sung bis 0.7um) und einen I-line Stepper (Aufl\u00f6sung bis 0.4um). Diese sind auch Mix-and-Match kompatibel zu unseren Elektronenstrahlschreibern und erlauben so eine kosteneffiziente Umsetzung von Pattern mit unterschiedlichen Aufl\u00f6sungsanforderungen.\n\t\t\t\t\t<\/p>\n\t\t\t\t\n\t\t\t<\/div>\n\t\t\t\n\t\t<\/div>\n\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<section class=\"elementor-section elementor-top-section elementor-element elementor-element-9b54cd8 elementor-section-boxed elementor-section-height-default elementor-section-height-default exad-glass-effect-no exad-sticky-section-no\" data-id=\"9b54cd8\" data-element_type=\"section\" data-e-type=\"section\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-100 elementor-top-column elementor-element elementor-element-3381303 exad-glass-effect-no exad-sticky-section-no\" data-id=\"3381303\" data-element_type=\"column\" data-e-type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-58cc6fe elementor-icon-list--layout-inline elementor-list-item-link-full_width exad-sticky-section-no exad-glass-effect-no elementor-widget elementor-widget-icon-list\" data-id=\"58cc6fe\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"icon-list.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<ul class=\"elementor-icon-list-items elementor-inline-items\">\n\t\t\t\t\t\t\t<li class=\"elementor-icon-list-item elementor-inline-item\">\n\t\t\t\t\t\t\t\t\t\t\t<a href=\"https:\/\/www.ims-chips.de\/\/?page_id=3189\">\n\n\t\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-icon\">\n\t\t\t\t\t\t\t<i aria-hidden=\"true\" class=\"fas fa-dot-circle\"><\/i>\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-text\">Silizium-Photonik<\/span>\n\t\t\t\t\t\t\t\t\t\t\t<\/a>\n\t\t\t\t\t\t\t\t\t<\/li>\n\t\t\t\t\t\t\t\t<li class=\"elementor-icon-list-item elementor-inline-item\">\n\t\t\t\t\t\t\t\t\t\t\t<a href=\"https:\/\/www.ims-chips.de\/\/?page_id=947\">\n\n\t\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-icon\">\n\t\t\t\t\t\t\t<i aria-hidden=\"true\" class=\"fas fa-dot-circle\"><\/i>\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-text\">Integrierte Schaltungen &amp; Systeme<\/span>\n\t\t\t\t\t\t\t\t\t\t\t<\/a>\n\t\t\t\t\t\t\t\t\t<\/li>\n\t\t\t\t\t\t\t\t<li class=\"elementor-icon-list-item elementor-inline-item\">\n\t\t\t\t\t\t\t\t\t\t\t<a href=\"https:\/\/www.ims-chips.de\/\/?page_id=980\">\n\n\t\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-icon\">\n\t\t\t\t\t\t\t<i aria-hidden=\"true\" class=\"fas fa-dot-circle\"><\/i>\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-text\">M(E)MS-Technologien<\/span>\n\t\t\t\t\t\t\t\t\t\t\t<\/a>\n\t\t\t\t\t\t\t\t\t<\/li>\n\t\t\t\t\t\t<\/ul>\n\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<section class=\"elementor-section elementor-top-section elementor-element elementor-element-eee9944 elementor-section-boxed elementor-section-height-default elementor-section-height-default exad-glass-effect-no exad-sticky-section-no\" data-id=\"eee9944\" data-element_type=\"section\" data-e-type=\"section\" data-settings=\"{&quot;animation&quot;:&quot;none&quot;}\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-50 elementor-top-column elementor-element elementor-element-a358ba9 exad-glass-effect-no exad-sticky-section-no\" data-id=\"a358ba9\" data-element_type=\"column\" data-e-type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-2c54ad8 exad-sticky-section-no exad-glass-effect-no elementor-widget elementor-widget-heading\" data-id=\"2c54ad8\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t<h5 class=\"elementor-heading-title elementor-size-default\">Ihre Idee - Unsere Mission<\/h5>\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-f258458 exad-sticky-section-no exad-glass-effect-no elementor-widget elementor-widget-text-editor\" data-id=\"f258458\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\tIn enger Kooperation mit unseren Kunden entwickeln wir Technologien, Prozesse und Komponenten, wobei die entwickelten Produkte in unserem Technologiebereich qualifiziert und auf Wunsch als Einzelprodukt oder zertifiziert in einer Kleinserie hergestellt werden k\u00f6nnen.\n\nZusammen mit Ger\u00e4te- sowie Materialherstellern evaluieren wir deren Produkte in unserer Linie, somit k\u00f6nnen diese potenziellen Kunden vorgef\u00fchrt werden. Beispielsweise nutzt unser Partner Heidelberg Instruments den IMS-Reinraum zur Demonstration des Laserschreibers ULTRA.\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<section class=\"elementor-section elementor-inner-section elementor-element elementor-element-8b3803d elementor-section-boxed elementor-section-height-default elementor-section-height-default exad-glass-effect-no exad-sticky-section-no\" data-id=\"8b3803d\" data-element_type=\"section\" data-e-type=\"section\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-50 elementor-inner-column elementor-element elementor-element-09928e6 exad-glass-effect-no exad-sticky-section-no\" data-id=\"09928e6\" data-element_type=\"column\" data-e-type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-966e5f2 exad-sticky-section-no exad-glass-effect-no elementor-widget elementor-widget-image\" data-id=\"966e5f2\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"image.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<img decoding=\"async\" width=\"750\" height=\"520\" src=\"https:\/\/www.ims-chips.de\/wp-content\/uploads\/2021\/02\/20140213_Ebeam_Vistec_SB4050_IMG_1386-1024x710.jpg\" class=\"attachment-large size-large wp-image-5989\" alt=\"Ebeam Vistec SB4050\" srcset=\"https:\/\/www.ims-chips.de\/wp-content\/uploads\/2021\/02\/20140213_Ebeam_Vistec_SB4050_IMG_1386-1024x710.jpg 1024w, https:\/\/www.ims-chips.de\/wp-content\/uploads\/2021\/02\/20140213_Ebeam_Vistec_SB4050_IMG_1386-300x208.jpg 300w, https:\/\/www.ims-chips.de\/wp-content\/uploads\/2021\/02\/20140213_Ebeam_Vistec_SB4050_IMG_1386-768x533.jpg 768w, https:\/\/www.ims-chips.de\/wp-content\/uploads\/2021\/02\/20140213_Ebeam_Vistec_SB4050_IMG_1386-600x416.jpg 600w, https:\/\/www.ims-chips.de\/wp-content\/uploads\/2021\/02\/20140213_Ebeam_Vistec_SB4050_IMG_1386-1536x1065.jpg 1536w, https:\/\/www.ims-chips.de\/wp-content\/uploads\/2021\/02\/20140213_Ebeam_Vistec_SB4050_IMG_1386-2048x1421.jpg 2048w\" sizes=\"(max-width: 750px) 100vw, 750px\" \/>\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t<div class=\"elementor-column elementor-col-50 elementor-inner-column elementor-element elementor-element-a7c3584 exad-glass-effect-no exad-sticky-section-no\" data-id=\"a7c3584\" data-element_type=\"column\" data-e-type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-3d1e9da exad-sticky-section-no exad-glass-effect-no elementor-widget elementor-widget-image\" data-id=\"3d1e9da\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"image.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<img decoding=\"async\" width=\"750\" height=\"524\" src=\"https:\/\/www.ims-chips.de\/wp-content\/uploads\/2021\/02\/EUV_Maske_-M0506-42_IMG_1721-1024x715.jpg\" class=\"attachment-large size-large wp-image-5988\" alt=\"EUV Maske\" srcset=\"https:\/\/www.ims-chips.de\/wp-content\/uploads\/2021\/02\/EUV_Maske_-M0506-42_IMG_1721-1024x715.jpg 1024w, https:\/\/www.ims-chips.de\/wp-content\/uploads\/2021\/02\/EUV_Maske_-M0506-42_IMG_1721-300x209.jpg 300w, https:\/\/www.ims-chips.de\/wp-content\/uploads\/2021\/02\/EUV_Maske_-M0506-42_IMG_1721-768x536.jpg 768w, https:\/\/www.ims-chips.de\/wp-content\/uploads\/2021\/02\/EUV_Maske_-M0506-42_IMG_1721-600x419.jpg 600w, https:\/\/www.ims-chips.de\/wp-content\/uploads\/2021\/02\/EUV_Maske_-M0506-42_IMG_1721-1536x1073.jpg 1536w, https:\/\/www.ims-chips.de\/wp-content\/uploads\/2021\/02\/EUV_Maske_-M0506-42_IMG_1721-2048x1430.jpg 2048w\" sizes=\"(max-width: 750px) 100vw, 750px\" \/>\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t<div class=\"elementor-column elementor-col-50 elementor-top-column elementor-element elementor-element-b1da03f exad-glass-effect-no exad-sticky-section-no\" data-id=\"b1da03f\" data-element_type=\"column\" data-e-type=\"column\" data-settings=\"{&quot;background_background&quot;:&quot;classic&quot;}\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-cd148f9 exad-sticky-section-no exad-glass-effect-no elementor-widget elementor-widget-heading\" data-id=\"cd148f9\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t<h5 class=\"elementor-heading-title elementor-size-default\">Kontakt<\/h5>\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<section class=\"elementor-section elementor-inner-section elementor-element elementor-element-26ed23a elementor-section-boxed elementor-section-height-default elementor-section-height-default exad-glass-effect-no exad-sticky-section-no\" data-id=\"26ed23a\" data-element_type=\"section\" data-e-type=\"section\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-50 elementor-inner-column elementor-element elementor-element-3b946fa exad-glass-effect-no exad-sticky-section-no\" data-id=\"3b946fa\" data-element_type=\"column\" data-e-type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-806de86 exad-sticky-section-no exad-glass-effect-no elementor-widget elementor-widget-heading\" data-id=\"806de86\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t<h5 class=\"elementor-heading-title elementor-size-default\">Julian Hartbaum<\/h5>\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-2d7b14a exad-sticky-section-no exad-glass-effect-no elementor-widget elementor-widget-text-editor\" data-id=\"2d7b14a\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\tTel.: 0711 21855 471<br>\nE-Mail:<a href=\"mailto:hartbaum@ims-chips.de\"> Julian Hartbaum<\/a>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t<div class=\"elementor-column elementor-col-50 elementor-inner-column elementor-element elementor-element-db99158 exad-glass-effect-no exad-sticky-section-no\" data-id=\"db99158\" data-element_type=\"column\" data-e-type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-a46ec49 exad-sticky-section-no exad-glass-effect-no elementor-widget elementor-widget-image\" data-id=\"a46ec49\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"image.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<img loading=\"lazy\" decoding=\"async\" width=\"750\" height=\"938\" src=\"https:\/\/www.ims-chips.de\/wp-content\/uploads\/2021\/02\/20210120_JH_MG_9534.jpg\" class=\"attachment-large size-large wp-image-5860\" alt=\"Dr. Julian Hartbaum\" srcset=\"https:\/\/www.ims-chips.de\/wp-content\/uploads\/2021\/02\/20210120_JH_MG_9534.jpg 768w, https:\/\/www.ims-chips.de\/wp-content\/uploads\/2021\/02\/20210120_JH_MG_9534-240x300.jpg 240w, https:\/\/www.ims-chips.de\/wp-content\/uploads\/2021\/02\/20210120_JH_MG_9534-600x750.jpg 600w\" sizes=\"(max-width: 750px) 100vw, 750px\" \/>\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<div class=\"elementor-element elementor-element-2298e0f exad-sticky-section-no exad-glass-effect-no elementor-widget elementor-widget-text-editor\" data-id=\"2298e0f\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<p class=\"MsoNormal\">Gerne evaluieren wir auch die Umsetzung spezieller Kundenw\u00fcnsche oder entwickeln auf die jeweilige Anwendung zugeschnittene Prozesse. <br \/>Kontaktieren Sie uns!<span style=\"font-size: inherit;\">\u00a0<\/span><\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<section class=\"elementor-section elementor-top-section elementor-element elementor-element-755de67 elementor-section-boxed elementor-section-height-default elementor-section-height-default exad-glass-effect-no exad-sticky-section-no\" data-id=\"755de67\" data-element_type=\"section\" data-e-type=\"section\" data-settings=\"{&quot;animation&quot;:&quot;none&quot;}\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-50 elementor-top-column elementor-element elementor-element-fdbe040 exad-glass-effect-no exad-sticky-section-no\" data-id=\"fdbe040\" data-element_type=\"column\" data-e-type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-4a91b82 exad-sticky-section-no exad-glass-effect-no elementor-widget elementor-widget-heading\" data-id=\"4a91b82\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t<h5 class=\"elementor-heading-title elementor-size-default\">Produktbeispiele<\/h5>\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-1a5ec95 exad-sticky-section-no exad-glass-effect-no elementor-widget elementor-widget-heading\" data-id=\"1a5ec95\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t<h6 class=\"elementor-heading-title elementor-size-default\">Nano-Imprint Templates<\/h6>\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-033cd98 exad-sticky-section-no exad-glass-effect-no elementor-widget elementor-widget-text-editor\" data-id=\"033cd98\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<p>Wir fertigen Replikationsmaster auf Basis von Siliziumwafern, Quarzwafern, Maskenblanks oder SOI-Wafern. Als Struktur\u00fcbertrags-Technologien stehen RIE- und ICP-Verfahren, sowie Bosch- und Kryo-\u00c4tzverfahren zur Verf\u00fcgung. Durch anschlie\u00dfende Oberfl\u00e4chenbehandlungen k\u00f6nnen die Master professionell gereinigt, gegl\u00e4ttet und mit einer Antihaftbeschichtung versehen werden.<\/p><p>Auf Wunsch k\u00f6nnen Wafer vereinzelt werden. Die Formfaktoren reichen so von einigen mm\u00b2 bis zu 230 x 230 mm\u00b2.<\/p><p>Neben Bin\u00e4rstrukturen lassen sich Multi-Level-, Mesa-Strukturen und im Fotolack auch 3D-Analog-Strukturen realisieren.<\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<section class=\"elementor-section elementor-inner-section elementor-element elementor-element-e39d904 elementor-section-boxed elementor-section-height-default elementor-section-height-default exad-glass-effect-no exad-sticky-section-no\" data-id=\"e39d904\" data-element_type=\"section\" data-e-type=\"section\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-50 elementor-inner-column elementor-element elementor-element-94e1611 exad-glass-effect-no exad-sticky-section-no\" data-id=\"94e1611\" data-element_type=\"column\" data-e-type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-ed31c73 exad-sticky-section-no exad-glass-effect-no elementor-widget elementor-widget-image\" data-id=\"ed31c73\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"image.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<img loading=\"lazy\" decoding=\"async\" width=\"467\" height=\"288\" src=\"https:\/\/www.ims-chips.de\/wp-content\/uploads\/2021\/03\/500nm_pillars_1_5\u00b5m_height_Ausschnitt_Web.jpg\" class=\"attachment-large size-large wp-image-7826\" alt=\"500nm pillars 1_5\u00b5m height Ausschnitt\" srcset=\"https:\/\/www.ims-chips.de\/wp-content\/uploads\/2021\/03\/500nm_pillars_1_5\u00b5m_height_Ausschnitt_Web.jpg 467w, https:\/\/www.ims-chips.de\/wp-content\/uploads\/2021\/03\/500nm_pillars_1_5\u00b5m_height_Ausschnitt_Web-300x185.jpg 300w\" sizes=\"(max-width: 467px) 100vw, 467px\" \/>\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t<div class=\"elementor-column elementor-col-50 elementor-inner-column elementor-element elementor-element-4df0226 exad-glass-effect-no exad-sticky-section-no\" data-id=\"4df0226\" data-element_type=\"column\" data-e-type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-4ab38fd exad-sticky-section-no exad-glass-effect-no elementor-widget elementor-widget-image\" data-id=\"4ab38fd\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"image.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<img loading=\"lazy\" decoding=\"async\" width=\"467\" height=\"288\" src=\"https:\/\/www.ims-chips.de\/wp-content\/uploads\/2021\/03\/1_2.jpg\" class=\"attachment-large size-large wp-image-7825\" alt=\"Nanostrukturierung\" srcset=\"https:\/\/www.ims-chips.de\/wp-content\/uploads\/2021\/03\/1_2.jpg 467w, https:\/\/www.ims-chips.de\/wp-content\/uploads\/2021\/03\/1_2-300x185.jpg 300w\" sizes=\"(max-width: 467px) 100vw, 467px\" \/>\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t<div class=\"elementor-column elementor-col-50 elementor-top-column elementor-element elementor-element-a640b1a exad-glass-effect-no exad-sticky-section-no\" data-id=\"a640b1a\" data-element_type=\"column\" data-e-type=\"column\" data-settings=\"{&quot;background_background&quot;:&quot;classic&quot;}\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-37fdcdf exad-sticky-section-no exad-glass-effect-no elementor-widget elementor-widget-text-editor\" data-id=\"37fdcdf\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<p><strong>Weitere Informationen<\/strong><\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-4a1af4a elementor-icon-list--layout-traditional elementor-list-item-link-full_width exad-sticky-section-no exad-glass-effect-no elementor-widget elementor-widget-icon-list\" data-id=\"4a1af4a\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"icon-list.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<ul class=\"elementor-icon-list-items\">\n\t\t\t\t\t\t\t<li class=\"elementor-icon-list-item\">\n\t\t\t\t\t\t\t\t\t\t\t<a href=\"https:\/\/www.ims-chips.de\/wp-content\/uploads\/2025\/04\/IMS_Stamps_Flyer_2025_en_web.pdf\" target=\"_blank\">\n\n\t\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-icon\">\n\t\t\t\t\t\t\t<i aria-hidden=\"true\" class=\"far fa-file-pdf\"><\/i>\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-text\">Master Stamps <\/span>\n\t\t\t\t\t\t\t\t\t\t\t<\/a>\n\t\t\t\t\t\t\t\t\t<\/li>\n\t\t\t\t\t\t\t\t<li class=\"elementor-icon-list-item\">\n\t\t\t\t\t\t\t\t\t\t\t<a href=\"https:\/\/www.ims-chips.de\/\/download\/Einzelprozesse_IMS_Technologie.pdf\" target=\"_blank\">\n\n\t\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-icon\">\n\t\t\t\t\t\t\t<i aria-hidden=\"true\" class=\"far fa-file-pdf\"><\/i>\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-text\">Einzelprozessliste IMS CHIPS Technologie<\/span>\n\t\t\t\t\t\t\t\t\t\t\t<\/a>\n\t\t\t\t\t\t\t\t\t<\/li>\n\t\t\t\t\t\t<\/ul>\n\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-dd5f4ee elementor-icon-list--layout-traditional elementor-list-item-link-full_width exad-sticky-section-no exad-glass-effect-no elementor-widget elementor-widget-icon-list\" data-id=\"dd5f4ee\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"icon-list.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<ul class=\"elementor-icon-list-items\">\n\t\t\t\t\t\t\t<li class=\"elementor-icon-list-item\">\n\t\t\t\t\t\t\t\t\t\t\t<a href=\"https:\/\/beams-and-more.ims-chips.de\/\" target=\"_blank\">\n\n\t\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-icon\">\n\t\t\t\t\t\t\t<i aria-hidden=\"true\" class=\"icon icon-link\"><\/i>\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-text\">Workshop \"Beams &amp; More\"<\/span>\n\t\t\t\t\t\t\t\t\t\t\t<\/a>\n\t\t\t\t\t\t\t\t\t<\/li>\n\t\t\t\t\t\t<\/ul>\n\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-7886a48 exad-sticky-section-no exad-glass-effect-no elementor-widget elementor-widget-spacer\" data-id=\"7886a48\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"spacer.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<div class=\"elementor-spacer\">\n\t\t\t<div class=\"elementor-spacer-inner\"><\/div>\n\t\t<\/div>\n\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-d367555 exad-sticky-section-no exad-glass-effect-no elementor-widget elementor-widget-text-editor\" data-id=\"d367555\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<p><strong>Aktuelle Projekte<\/strong><\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-53078e8 elementor-icon-list--layout-traditional elementor-list-item-link-full_width exad-sticky-section-no exad-glass-effect-no elementor-widget elementor-widget-icon-list\" data-id=\"53078e8\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"icon-list.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<ul class=\"elementor-icon-list-items\">\n\t\t\t\t\t\t\t<li class=\"elementor-icon-list-item\">\n\t\t\t\t\t\t\t\t\t\t\t<a href=\"https:\/\/www.ims-chips.de\/\/?p=1659\">\n\n\t\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-icon\">\n\t\t\t\t\t\t\t<i aria-hidden=\"true\" class=\"icon icon-right-arrow\"><\/i>\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-text\">TAPES3 - Technologien f\u00fcr die n\u00e4chste Generation h\u00f6chstintegrierter Mikroelektronik<\/span>\n\t\t\t\t\t\t\t\t\t\t\t<\/a>\n\t\t\t\t\t\t\t\t\t<\/li>\n\t\t\t\t\t\t<\/ul>\n\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<section class=\"elementor-section elementor-top-section elementor-element elementor-element-72cbef6 elementor-section-boxed elementor-section-height-default elementor-section-height-default exad-glass-effect-no exad-sticky-section-no\" data-id=\"72cbef6\" data-element_type=\"section\" data-e-type=\"section\" data-settings=\"{&quot;animation&quot;:&quot;none&quot;}\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-50 elementor-top-column elementor-element elementor-element-91fa7c5 exad-glass-effect-no exad-sticky-section-no\" data-id=\"91fa7c5\" data-element_type=\"column\" data-e-type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-ad00c30 exad-sticky-section-no exad-glass-effect-no elementor-widget elementor-widget-heading\" data-id=\"ad00c30\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t<h6 class=\"elementor-heading-title elementor-size-default\">Optische Elemente<\/h6>\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-5c59cd4 exad-sticky-section-no exad-glass-effect-no elementor-widget elementor-widget-text-editor\" data-id=\"5c59cd4\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<p>Viele Kunden mit optischen Anwendungen nutzen unserer F\u00e4higkeit, komplexe Strukturen im Quarzglas auch im Sub-Mikrometerbereich pr\u00e4zise strukturieren zu k\u00f6nnen.<\/p><p>Als Basis dienen 150 mm oder 200 mm Quarzwafer oder quadratische Maskensubstrate in den Gr\u00f6\u00dfen 6\u00b4\u00b4 (6025) und 9\u00b4\u00b4 (9035). F\u00fcr spezielle Einsatzzwecke stehen Linien f\u00fcr runde 12\u00b4\u00b4- oder 17\u00b4\u00b4-Substrate zur Verf\u00fcgung.<\/p><p>Typische Anwendungen sind Fresnellinsen, Mikrolinsenarrays oder diffraktive optische Elemente.<\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-17f34bb exad-sticky-section-no exad-glass-effect-no elementor-widget elementor-widget-image\" data-id=\"17f34bb\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"image.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<img loading=\"lazy\" decoding=\"async\" width=\"546\" height=\"356\" src=\"https:\/\/www.ims-chips.de\/wp-content\/uploads\/2021\/03\/Fresnellinse_Web.jpg\" class=\"attachment-large size-large wp-image-7835\" alt=\"Fresnellinse\" srcset=\"https:\/\/www.ims-chips.de\/wp-content\/uploads\/2021\/03\/Fresnellinse_Web.jpg 546w, https:\/\/www.ims-chips.de\/wp-content\/uploads\/2021\/03\/Fresnellinse_Web-300x196.jpg 300w\" sizes=\"(max-width: 546px) 100vw, 546px\" \/>\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-223eba1 exad-sticky-section-no exad-glass-effect-no elementor-widget elementor-widget-spacer\" data-id=\"223eba1\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"spacer.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<div class=\"elementor-spacer\">\n\t\t\t<div class=\"elementor-spacer-inner\"><\/div>\n\t\t<\/div>\n\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t<div class=\"elementor-column elementor-col-50 elementor-top-column elementor-element elementor-element-6659f8a exad-glass-effect-no exad-sticky-section-no\" data-id=\"6659f8a\" data-element_type=\"column\" data-e-type=\"column\" data-settings=\"{&quot;background_background&quot;:&quot;classic&quot;}\">\n\t\t\t<div class=\"elementor-widget-wrap\">\n\t\t\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<section class=\"elementor-section elementor-top-section elementor-element elementor-element-4f23d01 elementor-section-boxed elementor-section-height-default elementor-section-height-default exad-glass-effect-no exad-sticky-section-no\" data-id=\"4f23d01\" data-element_type=\"section\" data-e-type=\"section\" data-settings=\"{&quot;animation&quot;:&quot;none&quot;}\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-50 elementor-top-column elementor-element elementor-element-103d415 exad-glass-effect-no exad-sticky-section-no\" data-id=\"103d415\" data-element_type=\"column\" data-e-type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-8dec84b exad-sticky-section-no exad-glass-effect-no elementor-widget elementor-widget-heading\" data-id=\"8dec84b\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t<h6 class=\"elementor-heading-title elementor-size-default\">Masken<\/h6>\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-a5ba95f exad-sticky-section-no exad-glass-effect-no elementor-widget elementor-widget-text-editor\" data-id=\"a5ba95f\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<p>IMS CHIPS betreibt seit \u00fcber 15 Jahren eine eigene Maskenlinie. Der Anlagenpark erlaubt sowohl die Prozessierung von bin\u00e4ren wie auch phasenschieben Masken in den Formaten 6025 und 9035. Wir bieten damit einerseits unseren Kunden eine L\u00f6sung aus einer Hand, nutzen die Prozesse aber auch f\u00fcr andere Anwendungen auf Maskenbasis<\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t<div class=\"elementor-column elementor-col-50 elementor-top-column elementor-element elementor-element-6912efb exad-glass-effect-no exad-sticky-section-no\" data-id=\"6912efb\" data-element_type=\"column\" data-e-type=\"column\" data-settings=\"{&quot;background_background&quot;:&quot;classic&quot;}\">\n\t\t\t<div class=\"elementor-widget-wrap\">\n\t\t\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<section class=\"elementor-section elementor-top-section elementor-element elementor-element-55f411f elementor-section-boxed elementor-section-height-default elementor-section-height-default exad-glass-effect-no exad-sticky-section-no\" data-id=\"55f411f\" data-element_type=\"section\" data-e-type=\"section\" data-settings=\"{&quot;animation&quot;:&quot;none&quot;}\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-50 elementor-top-column elementor-element elementor-element-2d4c9eb exad-glass-effect-no exad-sticky-section-no\" data-id=\"2d4c9eb\" data-element_type=\"column\" data-e-type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-27d11f7 exad-sticky-section-no exad-glass-effect-no elementor-widget elementor-widget-heading\" data-id=\"27d11f7\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t<h5 class=\"elementor-heading-title elementor-size-default\">Resist-Technologie<\/h5>\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-31181e6 exad-sticky-section-no exad-glass-effect-no elementor-widget elementor-widget-text-editor\" data-id=\"31181e6\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<p>Zur elektronenlithografischen Realisierung hochaufgel\u00f6ster und komplexer Strukturen bei einem akzeptablen Durchsatz evaluieren wir zusammen mit Lieferanten und potenziellen Nutzern laufend Resists f\u00fcr E-Beam-Anwendungen und entwickeln mit ausgew\u00e4hlten Proben Prozesse.<br \/>Die Resists werden bez\u00fcglich ihrer Leistungsparameter, wie Aufl\u00f6sung, Stabilit\u00e4t und Empfindlichkeit untersucht und die Prozesse auf die jeweilige Applikation zugeschnitten.<\/p><p>Zur Eliminierung von Aufladungseffekten w\u00e4hrend der Elektronenstrahlbelichtung wurden Kombinationen von Resists mit leitf\u00e4higen Schichten erfolgreich realisiert.<\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<section class=\"elementor-section elementor-inner-section elementor-element elementor-element-62e09a4 elementor-section-boxed elementor-section-height-default elementor-section-height-default exad-glass-effect-no exad-sticky-section-no\" data-id=\"62e09a4\" data-element_type=\"section\" data-e-type=\"section\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-50 elementor-inner-column elementor-element elementor-element-3518a3a exad-glass-effect-no exad-sticky-section-no\" data-id=\"3518a3a\" data-element_type=\"column\" data-e-type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-9bd0e2a exad-sticky-section-no exad-glass-effect-no elementor-widget elementor-widget-image\" data-id=\"9bd0e2a\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"image.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<img loading=\"lazy\" decoding=\"async\" width=\"373\" height=\"247\" src=\"https:\/\/www.ims-chips.de\/wp-content\/uploads\/2021\/03\/Multi-layer_Structures_1_Web.jpg\" class=\"attachment-large size-large wp-image-7840\" alt=\"Nanostrukturierung\" srcset=\"https:\/\/www.ims-chips.de\/wp-content\/uploads\/2021\/03\/Multi-layer_Structures_1_Web.jpg 373w, https:\/\/www.ims-chips.de\/wp-content\/uploads\/2021\/03\/Multi-layer_Structures_1_Web-300x199.jpg 300w\" sizes=\"(max-width: 373px) 100vw, 373px\" \/>\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t<div class=\"elementor-column elementor-col-50 elementor-inner-column elementor-element elementor-element-d2147d0 exad-glass-effect-no exad-sticky-section-no\" data-id=\"d2147d0\" data-element_type=\"column\" data-e-type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-2875633 exad-sticky-section-no exad-glass-effect-no elementor-widget elementor-widget-image\" data-id=\"2875633\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"image.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<img loading=\"lazy\" decoding=\"async\" width=\"373\" height=\"247\" src=\"https:\/\/www.ims-chips.de\/wp-content\/uploads\/2021\/03\/3D_Analog_Struktru.Web2_.jpg\" class=\"attachment-large size-large wp-image-7839\" alt=\"Nanostrukturierung\" srcset=\"https:\/\/www.ims-chips.de\/wp-content\/uploads\/2021\/03\/3D_Analog_Struktru.Web2_.jpg 373w, https:\/\/www.ims-chips.de\/wp-content\/uploads\/2021\/03\/3D_Analog_Struktru.Web2_-300x199.jpg 300w\" sizes=\"(max-width: 373px) 100vw, 373px\" \/>\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t<div class=\"elementor-column elementor-col-50 elementor-top-column elementor-element elementor-element-6da2fa2 exad-glass-effect-no exad-sticky-section-no\" data-id=\"6da2fa2\" data-element_type=\"column\" data-e-type=\"column\" data-settings=\"{&quot;background_background&quot;:&quot;classic&quot;}\">\n\t\t\t<div class=\"elementor-widget-wrap\">\n\t\t\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<\/div>\n\t\t","protected":false},"excerpt":{"rendered":"<p>Nanostrukturierung IMS hat zwischenzeitlich mehr als 30 Jahre Erfahrung im Bereich der Elektronenstrahllithografie f\u00fcr die Herstellung hochaufgel\u00f6ster, komplexer Strukturen. Aktuell arbeiten wir mit der dritten Ger\u00e4tegeneration, bestehend aus zwei Formstrahlschreibern von Vistec f\u00fcr Substratgr\u00f6\u00dfen zwischen 150 mm und 450 mm. Mit der dazugeh\u00f6rigen Prozess-Infrastruktur fertigen wir z. B. Nano-Imprint Master, [&hellip;]<\/p>\n","protected":false},"author":1,"featured_media":0,"parent":0,"menu_order":0,"comment_status":"closed","ping_status":"closed","template":"page-templates\/template-pagebuilder-full-width.php","meta":{"footnotes":""},"class_list":["post-983","page","type-page","status-publish","hentry"],"yoast_head":"<!-- This site is optimized with the Yoast SEO plugin v27.1.1 - https:\/\/yoast.com\/product\/yoast-seo-wordpress\/ -->\n<title>Nanostrukturierung - Institut f\u00fcr Mikroelektronik Stuttgart<\/title>\n<meta name=\"description\" content=\"Nano-Imprint Templates, Nano-Imprint Mastering, Nanoimprint Master fabrication, Nanoimprint Template, Nanoimprint Mold, Nanoimprint Lithography\" \/>\n<meta name=\"robots\" content=\"index, follow, max-snippet:-1, max-image-preview:large, max-video-preview:-1\" \/>\n<link rel=\"canonical\" href=\"https:\/\/www.ims-chips.de\/?page_id=983\" \/>\n<meta property=\"og:locale\" content=\"de_DE\" \/>\n<meta property=\"og:type\" content=\"article\" \/>\n<meta property=\"og:title\" content=\"Nanostrukturierung - Institut f\u00fcr Mikroelektronik Stuttgart\" \/>\n<meta property=\"og:description\" content=\"Nano-Imprint Templates, Nano-Imprint Mastering, Nanoimprint Master fabrication, Nanoimprint Template, Nanoimprint Mold, Nanoimprint Lithography\" \/>\n<meta property=\"og:url\" content=\"https:\/\/www.ims-chips.de\/?page_id=983\" \/>\n<meta property=\"og:site_name\" content=\"Institut f\u00fcr Mikroelektronik Stuttgart\" \/>\n<meta property=\"article:modified_time\" content=\"2025-04-22T12:01:16+00:00\" \/>\n<meta property=\"og:image\" content=\"https:\/\/www.ims-chips.de\/wp-content\/uploads\/2020\/09\/GF_5_Nano_20140213_Ebeam_Vistec_SB4050_IMG_1370_klein.jpg\" \/>\n\t<meta property=\"og:image:width\" content=\"608\" \/>\n\t<meta property=\"og:image:height\" content=\"389\" \/>\n\t<meta property=\"og:image:type\" content=\"image\/jpeg\" \/>\n<meta name=\"twitter:card\" content=\"summary_large_image\" \/>\n<meta name=\"twitter:label1\" content=\"Gesch\u00e4tzte Lesezeit\" \/>\n\t<meta name=\"twitter:data1\" content=\"5\u00a0Minuten\" \/>\n<script type=\"application\/ld+json\" class=\"yoast-schema-graph\">{\"@context\":\"https:\/\/schema.org\",\"@graph\":[{\"@type\":\"WebPage\",\"@id\":\"https:\/\/www.ims-chips.de\/?page_id=983\",\"url\":\"https:\/\/www.ims-chips.de\/?page_id=983\",\"name\":\"Nanostrukturierung - Institut f\u00fcr Mikroelektronik Stuttgart\",\"isPartOf\":{\"@id\":\"https:\/\/www.ims-chips.de\/#website\"},\"primaryImageOfPage\":{\"@id\":\"https:\/\/www.ims-chips.de\/?page_id=983#primaryimage\"},\"image\":{\"@id\":\"https:\/\/www.ims-chips.de\/?page_id=983#primaryimage\"},\"thumbnailUrl\":\"https:\/\/www.ims-chips.de\/wp-content\/uploads\/2020\/09\/GF_5_Nano_20140213_Ebeam_Vistec_SB4050_IMG_1370_klein.jpg\",\"datePublished\":\"2020-09-11T13:39:35+00:00\",\"dateModified\":\"2025-04-22T12:01:16+00:00\",\"description\":\"Nano-Imprint Templates, Nano-Imprint Mastering, Nanoimprint Master fabrication, Nanoimprint Template, Nanoimprint Mold, Nanoimprint Lithography\",\"breadcrumb\":{\"@id\":\"https:\/\/www.ims-chips.de\/?page_id=983#breadcrumb\"},\"inLanguage\":\"de\",\"potentialAction\":[{\"@type\":\"ReadAction\",\"target\":[\"https:\/\/www.ims-chips.de\/?page_id=983\"]}]},{\"@type\":\"ImageObject\",\"inLanguage\":\"de\",\"@id\":\"https:\/\/www.ims-chips.de\/?page_id=983#primaryimage\",\"url\":\"https:\/\/www.ims-chips.de\/wp-content\/uploads\/2020\/09\/GF_5_Nano_20140213_Ebeam_Vistec_SB4050_IMG_1370_klein.jpg\",\"contentUrl\":\"https:\/\/www.ims-chips.de\/wp-content\/uploads\/2020\/09\/GF_5_Nano_20140213_Ebeam_Vistec_SB4050_IMG_1370_klein.jpg\",\"width\":608,\"height\":389,\"caption\":\"Mitarbeiter im Reinraum bei wissenschaftlicher Arbeit\"},{\"@type\":\"BreadcrumbList\",\"@id\":\"https:\/\/www.ims-chips.de\/?page_id=983#breadcrumb\",\"itemListElement\":[{\"@type\":\"ListItem\",\"position\":1,\"name\":\"Startseite\",\"item\":\"https:\/\/www.ims-chips.de\/\"},{\"@type\":\"ListItem\",\"position\":2,\"name\":\"Nanostrukturierung\"}]},{\"@type\":\"WebSite\",\"@id\":\"https:\/\/www.ims-chips.de\/#website\",\"url\":\"https:\/\/www.ims-chips.de\/\",\"name\":\"Institut f\u00fcr Mikroelektronik Stuttgart\",\"description\":\"\",\"publisher\":{\"@id\":\"https:\/\/www.ims-chips.de\/#organization\"},\"potentialAction\":[{\"@type\":\"SearchAction\",\"target\":{\"@type\":\"EntryPoint\",\"urlTemplate\":\"https:\/\/www.ims-chips.de\/?s={search_term_string}\"},\"query-input\":{\"@type\":\"PropertyValueSpecification\",\"valueRequired\":true,\"valueName\":\"search_term_string\"}}],\"inLanguage\":\"de\"},{\"@type\":\"Organization\",\"@id\":\"https:\/\/www.ims-chips.de\/#organization\",\"name\":\"Institut f\u00fcr Mikroelektronik Stuttgart\",\"alternateName\":\"IMS CHIPS\",\"url\":\"https:\/\/www.ims-chips.de\/\",\"logo\":{\"@type\":\"ImageObject\",\"inLanguage\":\"de\",\"@id\":\"https:\/\/www.ims-chips.de\/#\/schema\/logo\/image\/\",\"url\":\"https:\/\/www.ims-chips.de\/wp-content\/uploads\/2020\/09\/logo_ims.png\",\"contentUrl\":\"https:\/\/www.ims-chips.de\/wp-content\/uploads\/2020\/09\/logo_ims.png\",\"width\":262,\"height\":65,\"caption\":\"Institut f\u00fcr Mikroelektronik Stuttgart\"},\"image\":{\"@id\":\"https:\/\/www.ims-chips.de\/#\/schema\/logo\/image\/\"}}]}<\/script>\n<!-- \/ Yoast SEO plugin. -->","yoast_head_json":{"title":"Nanostrukturierung - Institut f\u00fcr Mikroelektronik Stuttgart","description":"Nano-Imprint Templates, Nano-Imprint Mastering, Nanoimprint Master fabrication, Nanoimprint Template, Nanoimprint Mold, Nanoimprint Lithography","robots":{"index":"index","follow":"follow","max-snippet":"max-snippet:-1","max-image-preview":"max-image-preview:large","max-video-preview":"max-video-preview:-1"},"canonical":"https:\/\/www.ims-chips.de\/?page_id=983","og_locale":"de_DE","og_type":"article","og_title":"Nanostrukturierung - Institut f\u00fcr Mikroelektronik Stuttgart","og_description":"Nano-Imprint Templates, Nano-Imprint Mastering, Nanoimprint Master fabrication, Nanoimprint Template, Nanoimprint Mold, Nanoimprint Lithography","og_url":"https:\/\/www.ims-chips.de\/?page_id=983","og_site_name":"Institut f\u00fcr Mikroelektronik Stuttgart","article_modified_time":"2025-04-22T12:01:16+00:00","og_image":[{"width":608,"height":389,"url":"https:\/\/www.ims-chips.de\/wp-content\/uploads\/2020\/09\/GF_5_Nano_20140213_Ebeam_Vistec_SB4050_IMG_1370_klein.jpg","type":"image\/jpeg"}],"twitter_card":"summary_large_image","twitter_misc":{"Gesch\u00e4tzte Lesezeit":"5\u00a0Minuten"},"schema":{"@context":"https:\/\/schema.org","@graph":[{"@type":"WebPage","@id":"https:\/\/www.ims-chips.de\/?page_id=983","url":"https:\/\/www.ims-chips.de\/?page_id=983","name":"Nanostrukturierung - Institut f\u00fcr Mikroelektronik Stuttgart","isPartOf":{"@id":"https:\/\/www.ims-chips.de\/#website"},"primaryImageOfPage":{"@id":"https:\/\/www.ims-chips.de\/?page_id=983#primaryimage"},"image":{"@id":"https:\/\/www.ims-chips.de\/?page_id=983#primaryimage"},"thumbnailUrl":"https:\/\/www.ims-chips.de\/wp-content\/uploads\/2020\/09\/GF_5_Nano_20140213_Ebeam_Vistec_SB4050_IMG_1370_klein.jpg","datePublished":"2020-09-11T13:39:35+00:00","dateModified":"2025-04-22T12:01:16+00:00","description":"Nano-Imprint Templates, Nano-Imprint Mastering, Nanoimprint Master fabrication, Nanoimprint Template, Nanoimprint Mold, Nanoimprint Lithography","breadcrumb":{"@id":"https:\/\/www.ims-chips.de\/?page_id=983#breadcrumb"},"inLanguage":"de","potentialAction":[{"@type":"ReadAction","target":["https:\/\/www.ims-chips.de\/?page_id=983"]}]},{"@type":"ImageObject","inLanguage":"de","@id":"https:\/\/www.ims-chips.de\/?page_id=983#primaryimage","url":"https:\/\/www.ims-chips.de\/wp-content\/uploads\/2020\/09\/GF_5_Nano_20140213_Ebeam_Vistec_SB4050_IMG_1370_klein.jpg","contentUrl":"https:\/\/www.ims-chips.de\/wp-content\/uploads\/2020\/09\/GF_5_Nano_20140213_Ebeam_Vistec_SB4050_IMG_1370_klein.jpg","width":608,"height":389,"caption":"Mitarbeiter im Reinraum bei wissenschaftlicher Arbeit"},{"@type":"BreadcrumbList","@id":"https:\/\/www.ims-chips.de\/?page_id=983#breadcrumb","itemListElement":[{"@type":"ListItem","position":1,"name":"Startseite","item":"https:\/\/www.ims-chips.de\/"},{"@type":"ListItem","position":2,"name":"Nanostrukturierung"}]},{"@type":"WebSite","@id":"https:\/\/www.ims-chips.de\/#website","url":"https:\/\/www.ims-chips.de\/","name":"Institut f\u00fcr Mikroelektronik Stuttgart","description":"","publisher":{"@id":"https:\/\/www.ims-chips.de\/#organization"},"potentialAction":[{"@type":"SearchAction","target":{"@type":"EntryPoint","urlTemplate":"https:\/\/www.ims-chips.de\/?s={search_term_string}"},"query-input":{"@type":"PropertyValueSpecification","valueRequired":true,"valueName":"search_term_string"}}],"inLanguage":"de"},{"@type":"Organization","@id":"https:\/\/www.ims-chips.de\/#organization","name":"Institut f\u00fcr Mikroelektronik Stuttgart","alternateName":"IMS CHIPS","url":"https:\/\/www.ims-chips.de\/","logo":{"@type":"ImageObject","inLanguage":"de","@id":"https:\/\/www.ims-chips.de\/#\/schema\/logo\/image\/","url":"https:\/\/www.ims-chips.de\/wp-content\/uploads\/2020\/09\/logo_ims.png","contentUrl":"https:\/\/www.ims-chips.de\/wp-content\/uploads\/2020\/09\/logo_ims.png","width":262,"height":65,"caption":"Institut f\u00fcr Mikroelektronik Stuttgart"},"image":{"@id":"https:\/\/www.ims-chips.de\/#\/schema\/logo\/image\/"}}]}},"_links":{"self":[{"href":"https:\/\/www.ims-chips.de\/index.php?rest_route=\/wp\/v2\/pages\/983","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.ims-chips.de\/index.php?rest_route=\/wp\/v2\/pages"}],"about":[{"href":"https:\/\/www.ims-chips.de\/index.php?rest_route=\/wp\/v2\/types\/page"}],"author":[{"embeddable":true,"href":"https:\/\/www.ims-chips.de\/index.php?rest_route=\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/www.ims-chips.de\/index.php?rest_route=%2Fwp%2Fv2%2Fcomments&post=983"}],"version-history":[{"count":3,"href":"https:\/\/www.ims-chips.de\/index.php?rest_route=\/wp\/v2\/pages\/983\/revisions"}],"predecessor-version":[{"id":12704,"href":"https:\/\/www.ims-chips.de\/index.php?rest_route=\/wp\/v2\/pages\/983\/revisions\/12704"}],"wp:attachment":[{"href":"https:\/\/www.ims-chips.de\/index.php?rest_route=%2Fwp%2Fv2%2Fmedia&parent=983"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}