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TRANSDUCERS' 2013 – The 17th International Conference on Solid-State Sensors, Actuators and Microsystems
June 16 - 20, 2013
The IMS will be represented with a presentation during "TRANSDUCERS' 2013“ in Barcelona.
Thursday 20 June 2013 (11:45 - 12:00)
Session Th2A - Flexible Technology:
"A FLEXIBLE STRESS SENSOR USING A SUB
-10µM SILICON CHIP TECHNOLOGY"
S. Ferwana, E.A. Angelopoulos, S. Endler, C. Harendt and J.N. Burghartz
For more information, please refer to TRANSDUCERS' 2013
Location: Centro de Convenciones Internacional de Barcelona (CCIB), Plaça de Willy Brandt 11-14, 08019 Barcelona
Opening ceremony of the clean room expansion at the Institut für Mikroelektronik Stuttgart
April 22, 2013
Baden-Württemberg´s Minister of Finance and Economy, Dr. Nils Schmid, and Stuttgart´s mayor, Fritz Kuhn, to inaugurate the new clean room.
After 2 years construction the new clean room at Institut für Mikroelektronik Stuttgart will be inaugurated in an opening ceremony on April 22nd. The inauguration will also include the newly acquired electron beam writer. The state of Baden-Württemberg is supporting the facility and equipment expansion with a total of 14.7 mio. Euros. The Institut für Mikroelektronik Stuttgart holds a leading position in nano structuring and the research and development of new micro chip and nano structure processing. The new clean room expansion increases the facility´s production area for semiconductors and other optical components by more than 50 %. The new "e-beam writer", being the third of its kind in the facility´s history, will guarantee the research institute´s future contribution to the development and manufacture of highly-precise optical components as well as the growing demands of the semiconductor sector.
 Opening ceremony press release
Location: Institut für Mikroelektronik Stuttgart, Allmandring 30a, Stuttgart
PRIME 2013 – 9th Conference on Ph. D. Research in Microelectronics and Electronics in Villach
June 24 - 27, 2013
The IMS will be represented with a presentation during PRIME 2013 in Villach.
Tarek Hassan: Session M2A – Oversampled ADCs,
Monday, 24/06/2013 (11:50 - 12:10)
“Variable-Step 12-bit ADC Based on Counter Ramp Recycling Architecture Suitable for CMOS Imagers with Column-Parallel Readout”
Tarek Hassan, Markus Strobel, Harald Richter and Joachim N. Burghartz
For more information, please refer to
http://www.microelectronicsevents.com
Location: Congress Center Villach, Europaplatz 1, 9500 Villach, Austria
Newsletter issue 1 2013
May 14, 2013
We present our IMS newsletter.
In this newsletter (issue 1, 2013) we would like to give you some highlights of our ongoing activities at the Institut fuer Mikroelektronik Stuttgart. The topics of the current issue are:
Opening ceremony of the clean room expansion at the IMS
After 2 years construction the new clean room at Institut für Mikroelektronik Stuttgart was inaugurated by the Minister of Finance and Economy, Dr. Nils Schmid, and the Stuttgart Mayor, Fritz Kuhn, in an opening ceremony on April 22nd. The inauguration also included the newly acquired electron beam writer.
µ-Probe, heatable steering plates for test cards
Silicon components with highly-precise micro structures open new possibilities in precision engineering: Newly-developed silicon steering plates with heating elements were integrated into test cards and successfully probed in a wafer tester. Using this technology precision-testing the next generation´s silicon chips is possible at different temperaturess.
Optical Elements for New Surface Metrology
The technology of high end novel optical elements as an essential part of precision EUV optics metrology has been developed at IMS. The work has been funded by the BMBF as a part of the German project „EUV-Lithografie für den 22-Nanometer-Knoten“, which was embedded in the European project EXEPT.
After the successful conclusion the EXEPT project has won the CATRENE Innovation Award 2012.
Guide to State-of-the-Art Electron Devices
Guide to State-of-the-Art Electron Devices marks the 60th anniversary of the IRE electron devices committee and the 35th anniversary of the
IEEE Electron Devices Society, as such it defines the state-of-the-art of electron devices, as well as future directions across the entire field.
Our current IMS Newsletter can be found under Publications - Current publications.
TEMPERATUR 2013
June 05 - 06, 2013
more ...
IEEE International Conference on Electron Devices and Solid-State Circuits (EDSSC 2013) in Hong Kong
June 03 - 05, 2013
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Smart Frame R&D Workshop at IMS
May 08, 2013
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MicroTEC Südwest: Cluster conference 2013
April 22 - 23, 2013
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BMBF-sponsored KoSiF project launched - industry and research teaming up on bendable and autonomous sensor systems
March 27, 2013
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Attractive Science - Energie Innovation Exchange at the International Chamber of Commerce (IHK) in Villingen-Schwenningen
March 20, 2013
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IMS Chipfilm™ Technology publication in IEEE Spectrum
March 01, 2013
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5th Innovation forum for Mico Technology & SmartSystems in Villingen-Schwenningen
February 27, 2013
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Lecture "Ultra Thin Chips: A new paradigm in silicon technology?"
February 12 - 14, 2013
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49. MPC Workshop 2013 in Mannheim
February 08, 2013
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CEB Clean Energy Building 2013 in Stuttgart
February 07 - 09, 2013
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"ASIC Lifecycle" seminar at the IMS on January 22nd, 2013
January 22, 2013
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Season´s Greetings
December 17, 2012
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The EXEPT project is awarded the CATRENE Innovation Award 2012
December 04, 2012
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µ-Probe project wrapped up successfully: Heatable steering plate fulfills expectations
November 30, 2012
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The HiDRaLoN project has been awarded the Demonstration Award 2012 during this year´s European Nanoelectronics Forum 2012
November 26, 2012
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Newsletter issue 2, 2012
October 30, 2012
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BMBF Project for New Chip Fabrication Technology Successfully Completed
October 29, 2012
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Successful progress of the HiDRaLoN project funded by the German Federal Ministry of Education and Research (BMBF)
October 22, 2012
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10th Workshop "Beams and More" 2012
October 18, 2012
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Microelectronics technology workshop
October 10 - 12, 2012
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The Director General of the Ministry of the Environment, Climate Protection and the Energy Sector, Helmfried Meinel, visited IMS CHIPS and inquired on the latest research developments
October 10, 2012
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Vienna-Tec 2012
October 09 - 12, 2012
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3rd Workshop - Packaging of PackMEMS 2012 Microsystems
October 02, 2012
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2nd PRONTO workshop to be held at the HSG-IMIT in Villingen-Schwenningen
September 26, 2012
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4th Electronics System ESTC 2012, Amsterdam
September 17 - 20, 2012
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"Business-oriented Research Facilities" event series of the International Chamber of Commerce at IMS
September 13, 2012
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BMBF Project ETIK Leads to Enhancement of EUV Lithography
August 30, 2012
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SMC - Practical course for students
July 16 - 27, 2012
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IMS CHIPS at Reutlinger Innovationstage 2012
July 12, 2012
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MedTech Pharma 2012
July 04 - 05, 2012
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Specialized Workshop „Intelligent Light“ at the IMS
June 28, 2012
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METEC awarded with the VR-InnovationsPreis Mittelstand 2012 prize
June 20, 2012
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8th Conference on Ph.D. Research in Microelectronics & Electronics in Aachen
June 12 - 15, 2012
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PRONTO production platform presented at SENSOR+TEST 2012
May 22 - 24, 2012
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MicroTEC Südwest: Cluster conference 2012
May 14 - 15, 2012
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Control 2012 - The International Trade Fair for Quality Assurance
May 08 - 12, 2012
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Retina Implant airs on „Die Sendung mit der Maus“
April 25, 2012
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PRONTO at HANOVER Industrial Fair, Hall 17 Stand C48
April 23 - 27, 2012
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SPIE Photonics Europe 2012
April 16 - 19, 2012
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Newsletter issue 1 2012
April 05, 2012
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24V ASICs hitting the market
March 21, 2012
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7th International Conference on Integrated Power Electronics Systems (CIPS) 2012 in Nuremberg
March 06 - 08, 2012
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4th Innovation forum for Mico Technology in Villingen-Schwenningen
February 29, 2012
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Symposium "Elektronische Baugruppen und Leiterplatten EBL 2012" in Fellbach
February 14 - 15, 2012
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Topping-out ceremony at IMS CHIPS: Extension of Cleanroom Building
February 13, 2012
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Baden-Württemberg´s State Secretary Ingo Rust visits the IMS
January 31, 2012
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The 25th International Conference on Micro Electro Mechanical Systems IEEE MEMS 2012 - Paris, France
January 29 - February 02, 2012
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"Microsystems: Science meets education"
January 27 - February 10, 2012
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The Micronarc Alpine Meeting MAM 2012 - Villars-sur Ollon, Switzerland
January 24, 2012
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Season´s Greetings
December 17, 2011
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Recognition for METEC during the award of the Innovation Prize of Baden-Württemberg
November 24, 2011
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Forum "be-flexible" 2011 - Flexible Electronic Systems, 10th International Workshop
November 23, 2011
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The ICT.OPEN 2011 BEST POSTER AWARD goes to the IMS
November 15, 2011
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ICT.OPEN 2011
November 14 - 15, 2011
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HiDRaLoN 4. User Group Workshop
November 11, 2011
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9th Workshop "Beams and More" 2011
October 27, 2011
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Microelectronics technology workshop
October 12 - 14, 2011
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GMM-Prize 2011 awarded to Evangelos Angelopoulos, IMS CHIPS, on October 12, 2011
October 12, 2011
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PRONTO production platform presented at MST Congress 2011 in Darmstadt
October 10 - 12, 2011
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Newsletter issue 2 2011
September 30, 2011
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Semiconductor Conference Dresden (SCD)
September 27 - 28, 2011
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SPIE Photomask Technology 31st Annual Symposium 2011
September 19 - 22, 2011
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42nd European Solid-State Device Research Conference (ESSDERC) in Bordeaux
September 17 - 21, 2011
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41st European Solid-State Device Research Conference (ESSDERC) in Helsinki
September 12 - 16, 2011
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IMS CHIPS Member of “eBeam Initiative”
September 12, 2011
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SMC - Practical course for students
July 18 - 29, 2011
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Day of the Innovation Alliance InnBW
July 14, 2011
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46. Heidelberger Bildverarbeitungsforum 2011, Kelheim near Regensburg
July 05, 2011
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Cluster Conference of the Spitzencluster MicroTEC Südwest
July 05 - 06, 2011
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First PRONTO workshop to be held at the Institut für Mikroelektronik Stuttgart
June 30, 2011
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Scientific Association of the Institut für Mikroelektronik Stuttgart e.V.
June 30, 2011
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PRONTO production platform presented at SENSOR+TEST 2011
June 07 - 09, 2011
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TRANSDUCERS' 11 – The 16th International Conference on Solid-State Sensors, Actuators and Microsystems
June 05 - 09, 2011
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TAE Business Breakfast – Competitive microsystem technology needs young talents
May 26, 2011
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"Microsystems: Science meets education"
May 23 - 31, 2011
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PRONTO production platform presented at SMT/HYBRID/PACKAGING 2011
May 03 - 05, 2011
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The HyperBraille display for the vision impaired opens new frontiers in education and business
April 28 - 30, 2011
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PRONTO at HANOVER Industrial Fair, Hall 6, Stand H18-E4
April 04 - 08, 2011
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German Microwave Conference 2011 in Darmstadt
March 14 - 16, 2011
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IMS CHIPS Standardizes on Cadence Silicon Realization Product Line for Advanced Gate Array Design
February 23, 2011
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ISSCC International Solid-State Circuits Conference 2011
February 20 - 24, 2011
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Ground breaking ceremony at IMS CHIPS : Extension of Cleanroom Building
February 15, 2011
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Nano Patterning Facility for Low/Mid Volume Production
February 14, 2011
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45. MPC Workshop 2011 in Albstadt-Sigmaringen
February 04, 2011
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Season´s Greetings
December 17, 2010
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New release Ultra-thin Chip Technology and Applications technical book
December 13, 2010
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"Microsystems: Science meets education"
December 07, 2010
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New Ultrathin Chip Fabrication Process Presented at IEDM 2010 in San Francisco
December 06 - 08, 2010
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Sensational medical success with IMS Retina Chip
December 02, 2010
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HiDRaLoN User Group Workshop
November 12, 2010
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Microsystem technology made in Baden-Württemberg: a story of success – also in the future!
October 15, 2010
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Microelectronics technology workshop
October 13 - 15, 2010
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"Embedded Systems & Smart Power" workshop
October 12, 2010
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PRONTO production platform at 4th Microsys fair in Stuttgart
September 13 - 16, 2010
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ESTC 2010, Berlin: Lecture "Packaging Challenges Associated with Warpage of Ultra-Thin Chips"
September 13 - 16, 2010
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Newsletter issue 2 2010
September 10, 2010
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Professional association of microelectronics IVAM joined
September 06, 2010
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SMC - Practical course for students
July 19 - 30, 2010
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8th Workshop "Beams and More" 2010
July 10, 2010
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The Landesforschungspreis für Angewandte Forschung goes to Professor Dr.-Ing. Joachim Burghartz in an award ceremony held in Stuttgart
July 08, 2010
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Chipfilm™ project completed successfull
June 29, 2010
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TanDEM-X - radar satellite liftoff from Baikkonur successful
June 21, 2010
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Science meets education: “Microchips”
June 21, 2010
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MoDekt – Final presentation on June 7, 2010 in Tuebingen
June 07, 2010
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IEEE EDS Mini-Kolloquium on June 7th, 2010
June 07, 2010
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54th International Conference on Electron, Ion, and Photon Beam Technology & Nanofabrication
June 01 - 04, 2010
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2. GMM Workshop — Technologien und Werkstoffe der Mikrosystem- und Nanotechnik
May 10 - 11, 2010
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New Braille display equipped with IMS ASICs at the SightCity 2010 in Frankfurt
April 28 - 30, 2010
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Professor Dr.-Ing. Joachim Burghartz of the Institut für Mikroelektronik Stuttgart is awarded the Landesforschungspreis für Angewandte Forschung
April 23, 2010
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Photomask and NGL Mask Technology XVII
April 13 - 15, 2010
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MEDEA+ Project FANTASTIC completed successfully!
April 11, 2010
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Newsletter issue 1 2010
March 26, 2010
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Joint project ValMon launched
February 09, 2010
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XLIII. MPC Workshop 2010 in Göppingen
February 05, 2010
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IMS CHIPS is awarded Spitzencluster MicroTEC Südwest
January 26, 2010
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Season´s Greetings
December 17, 2009
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Innovative learning media at IMS CHIPS
December 09, 2009
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Press release BMBF-Verbundprojekt HiDRaLoN
December 08, 2009
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Lecture "Anomalous Stress Effects in Ultra-Thin Silicon Chips on Foil"
December 07 - 09, 2009
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Again Paper Award at the SPIE Photomask Conference 2009 in Monterey, USA
December 07, 2009
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Science meets education: “Microchips”
November 30, 2009
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SAFE 2009 – Annual Workshop on Semiconductor Advances for Future Electronics and SENSORS
November 26 - 28, 2009
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8th International Conference on Nanoimprint and Nanoprint Technology
November 11 - 13, 2009
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First User Group Workshop within the scope of the HiDRaLoN project
November 06, 2009
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EDS Chapter Meeting on November 4th, 2009, in Reutlingen
November 04, 2009
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7th Workshop "Beams and More" 2009
October 22, 2009
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Microelectronics technology workshop
October 14 - 16, 2009
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Bipolar/BiCMOS Circuits and Technology Meeting (BCTM)
October 13 - 14, 2009
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IMS welcomes gifted youngsters
October 09, 2009
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Micro Nano Engeneering – MNE 2009
September 28 - October 01, 2009
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Newsletter issue 2 2009
September 25, 2009
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ESSDERC/ESSCIRC 2009, Athens: Lecture "Ultra-thin Chips - a New Paradigm in Silicon Technology"
September 14 - 18, 2009
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SPIE Photomask Technology 29th Annual Symposium (BACUS 2009)
September 14 - 17, 2009
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New technology development - medium-sized businesses gain access to Smart Power Chips
August 26, 2009
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EXEPT – 22 nm node EUV lithography
July 22, 2009
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SMC - Practical course for students
July 20 - 31, 2009
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Encore in federal cluster of excellence competition: MicroTEC Südwest in the final round again!
June 25, 2009
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TEMPERATUR 2009
June 24 - 25, 2009
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53rd International Conference on Electron, Ion, and Photon Beam Technology & Nanofabrication
May 26 - 29, 2009
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Project HiDRaLoN launched
May 24, 2009
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16th Symposium of the VDE/VDI “Mikrotechnik" workshop in Thüringen
May 19, 2009
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International Conference on IC Design & Technology
May 18 - 20, 2009
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New Braille display equipped with IMS ASICs at the SightCity 2009 in Frankfurt
May 13 - 15, 2009
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"Science and Technology" – classes at the IMS
April 21, 2009
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Hannover Fair, Hall 2 - Booth C21
April 20 - 24, 2009
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Photomask and NGL Mak Technology XVI
April 08 - 10, 2009
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Newsletter issue 1 2009
March 27, 2009
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SPIE Advanced Lithography 2009
February 22 - 27, 2009
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IMS CHIPS research group receives ISSCC Jack Raper Award
February 09, 2009
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XLI. MPC Workshop 2009 in Künzelsau
February 06, 2009
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New Collaboration in the Nanoimprint Lithography Industry
January 27, 2009
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Season´s Greetings
December 17, 2008
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Lecture "CMOS Imager Technologies for Biomedical Applications"
December 16, 2008
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Lecture "Ultra-thin Chips - a New Paradigm in Silicon Technology"
December 10 - 11, 2008
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Forum "be-flexible" 2008 - Thin Semiconductor Devices, 9th International Workshop
December 02, 2008
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SAFE 2008 – Annual Workshop on Semiconductor Advances for Future Electronics and SENSORS
November 27 - 28, 2008
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Microelectronics technology workshop
November 14 - 29, 2008
more ...
5. GMM-Workshop - Energieautarke Sensorik
November 12 - 13, 2008
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The IMS exhibits at VISION 2008 fair in Stuttgart
November 04 - 06, 2008
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4th Global Plastic Electronics Conference and Showcase
October 27 - 29, 2008
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IMS CHIPS and Robert Bosch signed contract
October 24, 2008
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6th Workshop "Masks and More" 2008
October 23, 2008
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HDRC® -Imager Workshop 2008
October 16, 2008
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Poster Award at the SPIE Photomask Conference 2008 in Monterey, USA
October 10, 2008
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SPIE Photomask Technology 28th Annual Symposium (BACUS 2008)
October 06 - 10, 2008
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Newsletter issue 2 2008
September 26, 2008
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U.R.S.I. Kleinheubacher Tagung 2008
September 22 - 25, 2008
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IMS CHIPS at Motek 2008
September 22 - 25, 2008
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IISB Lithography Simulation Workshop
September 18 - 20, 2008
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Sponsoring of the IMS hands-on course for students
August 04, 2008
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SMC - Practical course for students
July 14 - 25, 2008
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25 Years Institut für Mikroelektronik Stuttgart
July 09, 2008
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ASIC workshop 2008
May 27, 2008
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Hannover Fair, Hall 2 - Booth C21
April 21 - 25, 2008
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SPIE Photonics Europe 2008
April 07, 2008
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EU project MAGIC launched
March 28, 2008
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Newsletter issue 1 2008
March 27, 2008
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Image Sensors Europe, Conference
March 19 - 20, 2008
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MicroTEC Südwest in the finals
March 11, 2008
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hema presenting the HDRC® image sensor "seelector ICAM"
March 04, 2008
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IMS CHIPS at SPIE Advanced Lithography 2008
February 24 - 29, 2008
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New GFQ master
February 05, 2008
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ISSCC International Solid-State Circuits Conference 2008
February 03 - 07, 2008
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Closing Event: "Idea to Product"
January 14, 2008
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Season´s Greetings
December 16, 2007
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Germany's Federal Criminal Police Office (BKA) publishes the final report "Authentizität digitaler Bilder II" ("Authenticity of Digital Images - Part II") by IMS
December 10, 2007
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ABBILD - BMBF project wrapped up successfully!
November 30, 2007
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The IMS exhibits at Innovation Fair & Congress 07
November 29, 2007
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Article in Photonik magazine on the application "Thin-Film-on-CMOS
November 15, 2007
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The IMS exhibits at VISION 2007 fair in Stuttgart
November 06 - 08, 2007
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5th Workshop "Masks and More" 2007
October 26, 2007
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SPIE Photomask Technology 27th Annual Symposium (BACUS 2007)
September 17 - 21, 2007
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Chipfilm joint project launched
August 28, 2007
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SMC - Practical course for students
July 16 - March 27, 2007
more ...
New HyperBraille user interface for the blind and the vision impaired
July 09, 2007
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Successful launch for TerraSAR-X – Microchips from Stuttgart on Board
June 15, 2007
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Nanoimprint Lithography - Project FANTASTIC
June 14, 2007
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IMS CHIPS exhibits at MiNaT 2007
June 12 - 14, 2007
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Conference programme 13th SENSOR Conference
May 22, 2007
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6th Annual Mechatronics Day in Göppingen
May 09, 2007
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Photomask Japan 2007
April 17 - 20, 2007
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Hannover Fair, Hall 2 - Booth C19
April 16 - 20, 2007
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Advanced Night Vison Systems - NIRWARN
April 05, 2007
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We present our IMS newsletter
April 02, 2007
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Welcome back after our Relaunch!
March 14, 2007
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33. Bildverarbeitungsforum in Mannheim
March 06, 2007
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Website relaunch
March 04, 2007
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VIP Innovations-Workshop
March 01, 2007
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Article in Spiegel magazine on HDR photography
March 01, 2007
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Retina Implant
February 22, 2007
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SafetyEYE® - a safe look with HDRC® image sensors
February 22, 2007
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Intensive Course Microelectronic Technology
February 19 - 22, 2007
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New ultra-thin chip fabrication process
December 12, 2006
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International Electron Devices Meeting
December 11, 2006
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Best Paper Award at Photomask Japan 2006
November 21, 2006
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Brilliant recording with high-dynamic digital camera, optimized signal processing and rendering with a new type of display.
November 21, 2006
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Workshop on ''Microhandling''
October 31, 2006
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Lithography Workshop 2006
October 26, 2006
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IMS at the fair VISION 2006 in Stuttgart
October 23 - November 09, 2006
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Intensive Course Microelectronic Technology
July 31 - August 04, 2006
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Microchips - a Hands-on Course for Students
July 24 - August 04, 2006
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''Sensor technology - the way to the future''
May 22, 2006
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Workshop ''New Applications in Silicon Technology''
May 17, 2006
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MORE than Moore – New Applications in Silicon Technology
May 08, 2006
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Exhibition at the Solar Information Center in Freiburg/Brsg., Germany, by members of the Baden-Wuerttemberg Association for Mircrosystem Technology (MST BW)
May 04, 2006
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Hannover Fair, Hall 2 - Booth C19
April 24 - 28, 2006
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Lecture on Semiconductor Technology 2
April 05, 2006
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European project IVP successfully completed
March 06, 2006
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Intensive Course Microelectronic Technology
February 20 - 24, 2006
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Prof. Dr. J. Burghartz has been appointed new director at IMS
October 01, 2005
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The first eight EUV fullfield masks have been manfactured for ASML
August 10, 2005
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