Replication master

We offer the manufacturing of masters with the required profile quality for a high yield replication process. The master can be made of silicon or quartz, the resolution limit is 60nm dense lines and the pattern size is only limited by the substrate size (150mm wafer or 9 inch quartz plate).

Master with a complex grating structured in a 9 inch quartz plate

Features of different sizes in a 800nm thick top silicon layer of a SOI wafer

500nm pillars, 1.5µm height on a 15µm silicon pedestal

Contact

For further information, please contact: Mathias Irmscher