The IMS has a 750 m² (from 2012: 1200 m²) class 10 clean-room. This is where complete circuits are manufactured on 150 mm silicon wafers using a 0.5 µm CMOS process. In addition, we produce micro systems, membranes, replication masters, diffractive optical elements, photo masks as well as specialized components. Furthermore, we have a ceramics assembly line available for the circuits and systems design.
The manufacturing technology is certified according to QC 01002-3 (EN 100114).
The IMS offers all existing overall processes and individual processes or processing modules as well as measurement services in combination with technical consultancy for research & development where required or as support service for the manufacturing lines.
Partnering with our customers we also develop new processes or technologies based on our equipment.
For more information on the Single process steps, please go to
Fields of activity - Technology services